Micro electro-mechanical system which includes an electromagnetically operated actuator mechanism

• US 6,454,396 B2
• Filed: 05/25/2001
• Issued: 09/24/2002
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Zamtec Limited (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Gordon, Raquel Yvette
• Application Number:
  US09/864,343
• Publication Number:
  US 20010022598A1
• Time in Patent Office: 487 Days
• Field of Search: 347/54, 347/68, 347/69, 347/70, 347/71, 347/72, 347/50, 347/40, 347/20, 347/44, 347/47, 347/27, 347/63, 399/261, 361/700, 310/328-330, 298/901
• US Class Current: 347/54
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1643 thin film formation by plating
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2002/041 Electromagnetic transducer

Abstract

A micro electro-magnetic system includes a substrate. An actuator mechanism is arranged on the substrate. An actuator arm is displaceably mounted on the substrate and is displaceable with respect to the substrate along a predetermined path of travel. The actuator arm has a plurality of spaced magnetic poles along its length. An electromagnetic field generator is operatively positioned with respect to the actuator arm and is capable of producing an electromagnetic field of sufficient strength to interact with the spaced magnetic poles so that the actuator arm is displaced along the path of travel. A control system is provided for controlling operation of the electromagnetic field generator.

Claims

1. A micro electro-mechanical system which is the product of an integrated circuit fabrication technique comprises

a substrate;

and

an actuator mechanism arranged on the substrate and comprising

an actuator arm that is displaceably mounted on the substrate and which is displaceable with respect to the substrate along a predetermined path of travel, the actuator arm having a plurality of spaced magnetic poles along its length;

an electromagnetic field generator that is operatively positioned with respect to the actuator arm and which is capable of producing an electromagnetic field of sufficient strength to interact with the spaced magnetic poles so that the actuator arm is displaced along the path of travel; and

a control system for controlling operation of the electromagnetic field generator.

2. A micro electro-mechanical system as claimed in claim 1, in which the actuator arm has a linear configuration with the predetermined path also being linear so that that the actuator arm travels in a generally linear direction.

3. A micro electro-mechanical system as claimed in claim 2, which includes a guide formation arranged on the substrate to guide the actuator arm along the predetermined path of travel.

4. A micro electro-mechanical system as claimed in claim 1, in which the electromagnetic field generator is in the form of a series of actuable electromagnets positioned along the substrate and having magnetic poles which correspond with the magnetic poles on the actuator arm.

5. A micro electro-mechanical system as claimed in claim 4, in which the electromagnets are positioned on each side of the predetermined path.

6. A micro electro-mechanical system as claimed in claim 4, in which the electromagnets are connected to drive circuitry on the substrate to provide the electromagnets with an electrical current when required, the drive circuitry being operatively connected to the control system.

7. A micro electro-mechanical system as claimed in claim 6, in which the control system is configured to energize the electromagnets in a phased manner so that the actuator arm undergoes linear stepped movement.

8. A micro electro-mechanical system as claimed in claim 1, in which the actuator arm has a working end which is engageable with a prime mover.

9. An ink jet printhead which is the product of an integrated circuit fabrication technique comprises

a substrate;

and

an actuator mechanism arranged on the substrate and comprising

an actuator arm that is displaceably mounted on the substrate and which is displaceable with respect to the substrate along a predetermined path of travel, the actuator arm having a plurality of spaced magnetic poles along its length;

an electromagnetic field generator that is operatively positioned with respect to the actuator arm and which is capable of producing an electromagnetic field of sufficient strength to interact with the spaced magnetic poles so that the actuator arm is displaced along the path of travel; and

a control system for controlling operation of the electromagnetic field generator.