Dual axis micro machined mirror device
First Claim
Patent Images
1. An apparatus for supporting a mass, comprising;
- (a) a mass having a first axis and a second axis of rotation;
(b) a pair of T-shaped hinges attached to a support structure supporting said mass, each T-shaped hinge having a first leg member attached to the mass and a T-member attached to the leg and to the support structure at opposite ends of the T-member, said T-member and leg member capable of torsional and translational movement;
(c) at least two devices operatively associated with the mass and located to apply force to the mass, the force capable of rotating the mass about the first and second axes, wherein the T-shaped hinges allow for the mass vertical movement, movement along a first planar direction and movement along a second planar direction, wherein said vertical, first and second planar directions are orthogonal to each other.
3 Assignments
0 Petitions
Accused Products
Abstract
A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges. At least two electrostatic force application pads are disposed to rotate the mirror about a primary axis and about a secondary axis.
-
Citations
25 Claims
-
1. An apparatus for supporting a mass, comprising;
-
(a) a mass having a first axis and a second axis of rotation;
(b) a pair of T-shaped hinges attached to a support structure supporting said mass, each T-shaped hinge having a first leg member attached to the mass and a T-member attached to the leg and to the support structure at opposite ends of the T-member, said T-member and leg member capable of torsional and translational movement;
(c) at least two devices operatively associated with the mass and located to apply force to the mass, the force capable of rotating the mass about the first and second axes, wherein the T-shaped hinges allow for the mass vertical movement, movement along a first planar direction and movement along a second planar direction, wherein said vertical, first and second planar directions are orthogonal to each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A method for supporting a mass, comprising;
-
(a) supporting the mass with a pair of T-shaped hinges attached to a support structure, each T-shaped hinge having a first leg member attached to the mass and a T-member attached to the leg and to the support structure at opposite ends of the T-member, said T-member and leg member capable of torsional and translational movement, wherein the T-shaped hinges allow for the mass vertical movement, movement along a first planar direction and movement along a second planar direction, wherein said vertical, first and second planar directions are orthogonal to each other; and
(b) oscillating the mass about a first axis with at least two devices capable of applying force to the mass; and
(c) oscillating the mass about a second axis with the at least two devices. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
-
Specification