Method and apparatus for determining the pass through flux of magnetic materials

• US 6,454,911 B1
• Filed: 08/03/2000
• Issued: 09/24/2002
• Est. Priority Date: 06/01/2000
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Xu, Yun, Turner, Stephen, Guo, Wei
• Primary Examiner(s): VerSteeg, Steven H.
• Application Number:
  US09/631,856
• Time in Patent Office: 782 Days
• Field of Search: 204/192.13, 204/298.13, 204/298.17, 204/298.03, 118/712, 427/8, 738/66, 324/200, 324/260, 324/251, 324/259, 324/246
• US Class Current: 204/192.13
• CPC Class Codes: G01R 33/10 Plotting field distribution ; Measuring field distribution

Abstract

The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering.

Claims

1. An apparatus for determining the pass through flux of a magnetic material comprising:

at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;

one or more magnetic field detectors configured to measure one or more of x and y components of the magnetic field;

a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and

a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.

2. The apparatus of claim 1 wherein the one or more magnetic field detectors are two or more magnetic field detectors configured to measure two or more of x, y and z components of the magnetic field.

3. The apparatus of claim 1 wherein the at least one magnetic source is at least two magnetic sources.

4. The apparatus of claim 1 wherein the at least one magnetic source is at least two magnetic sources, and wherein the one or more magnetic field detectors are two or more magnetic field detectors configured to measure two or more of x, y and z components of the magnetic field.

5. The apparatus of claim 1 wherein the magnetic material is a sputtering target, the apparatus comprising a nonmagnetic spacer between the magnetic source and the sputtering target;

the spacer having a recess formed therein to receive the sputtering target.

6. The apparatus of claim 1 wherein the magnetic source comprises at least one ring-shaped magnet.

7. The apparatus of claim 6 wherein the at least one ring-shaped magnet is a single ring-shaped magnet and surrounds a solid magnet.

8. The apparatus of claim 6 wherein the at least one ring-shaped magnet comprises a first ring-shaped magnet within a second ring-shaped magnet.

9. The apparatus of claim 6 wherein the at least one ring-shaped magnet is an electromagnet.

10. The apparatus of claim 1 wherein the magnetic source comprises only one ring-shaped magnet.

11. The apparatus of claim 1 wherein the magnetic source comprises two ring-shaped magnets, and wherein the magnets are arranged in such a way that opposing poles are aligned in opposite directions.

12. The apparatus of claim 1 further comprising a non-magnetic spacer separating the at least one magnetic source from the magnetic material.

13. The apparatus of claim 1 comprising three of the magnetic field detectors, with each of the three magnetic field detectors being configured to detect a component of the magnetic field that is orthogonal to the components of the magnetic field detected by the other two magnetic field detectors.

14. A method for determining the pass through flux of a magnetic material comprising:

generating a magnetic field on one side of the magnetic material and passing the magnetic field through the magnetic material and out an other side of the magnetic material; and

collecting magnetic field vector information at said other side of the magnetic material with two or more detectors;

the two or more detectors measuring one or more of the x, y and z components of the magnetic field.

15. The method of claim 14 comprising two or more detectors configured to measure two or more of the x, y and z components of the magnetic field.

16. The method of claim 15 wherein the magnetic field is generated by a magnet, and further comprising moving one or both of the magnetic material and magnet during the collecting.

17. The method of claim 14 wherein the magnetic field is generated by a magnet, and further comprising moving one or both of the magnetic material and magnet during the collecting.

18. The method of claim 14 comprising three detectors configured to measure one or more of the x, y and z components of the magnetic field.

19. The method of claim 14 wherein the magnetic field is generated by two or more magnetic sources.

20. A method for determining the pass through flux of a magnetic material comprising:

generating a magnetic field on one side of the magnetic material and passing the magnetic field through the magnetic material and out an other side of the magnetic material;

collecting magnetic field vector information at said other side of the magnetic material with three separate detectors;

each of the three detectors being configured to detect a component of the magnetic field that is orthogonal to the components of the magnetic field detected by the other two detectors.

21. The method of claim 20 further comprising moving each of the three detectors during the collecting.

22. The method of claim 20 wherein the magnetic field is generated by a magnet, and further comprising moving one or both of the magnetic material and magnet during the collecting.

23. The method of claim 20 further comprising processing the magnetic field vector information to correlate the vector information with locations over the material where the information is obtained, and plotting the vector information in a map showing intensity of magnetic field vectors over locations of the material.

24. The method of claim 20 wherein the three detectors are Hall probes, and further comprising collecting magnetic field vector information with other Hall probe detectors besides the three detectors.

25. The method of claim 20 wherein the magnetic material is in the form of a sputtering target.

26. The method of claim 20 wherein the magnetic material is in the form of a disc-shaped sputtering target.

27. The method of claim 20 wherein the magnetic material is in the form of a sputtering target, wherein the magnetic field is generated by a magnet, wherein the sputtering target is spaced from the magnet by a non-magnetic spacer, and wherein the spacer has a recess formed therein to receive the sputtering target.

28. The method of claim 20 wherein the magnetic field is generated from no more than two ring-shaped magnets, with one of the two ring-shaped magnets surrounding the other of the two ring-shaped magnets.

29. The method of claim 20 wherein the magnetic field is generated by a single ring-shaped magnet.

30. The method of claim 20 wherein the magnetic field is generated by a solid magnet within a ring-shaped magnet.

31. The method of claim 20 wherein the magnetic field source comprises a ring-shaped magnet within a larger ring-shaped magnet.

32. The method of claim 20 wherein the magnetic field is generated by one or more electromagnets.

33. A method for determining the uniformity of a magnetic sputtering target comprising:

generating a magnetic field at one side of a sputtering target, and passing the magnetic field through the sputtering target and out an other side of the sputtering target;

collecting magnetic field vector information at said other side of the magnetic material with at least two separate detectors;

one of the at least two detectors being configured to detect a component of the magnetic field that is orthogonal to the component of the magnetic field detected by at least one other of the at least two detectors; and

processing the magnetic field vector information to determine a measure of uniformity of the magnetic sputtering target.

34. The method of claim 33 further comprising moving the at least two detectors during the collecting.

35. The method of claim 33 further comprising moving at least some of the at least two detectors during the collecting and collecting magnetic field vector information at more than 10 separate data-points with each of the moved detectors.

36. The method of claim 33 further comprising moving at least some of the at least two detectors during the collecting and collecting magnetic field vector information at more than 100 separate data-points with each of the moved detectors.

37. The method of claim 33 wherein the magnetic field is generated by a magnet, and further comprising moving one or both of the target and magnet during the collecting.

38. The method of claim 33 further comprising processing the magnetic field vector information to correlate the vector information with locations over the sputtering target where the information is obtained, and plotting the vector information on a map showing intensity of magnetic field vectors over locations of the sputtering target.

39. The method of claim 33 wherein the two detectors are Hall probes, and further comprising collecting magnetic field vector information with other Hall probe detectors besides the two detectors.

40. The method of claim 33 wherein the magnetic field is generated by a magnet, wherein the sputtering target is spaced from the magnet by a non-magnetic spacer, and wherein the spacer has a recess formed therein to receive the sputtering target.

41. The method of claim 33 wherein the magnetic field is generated from no more than two ring-shaped magnets, with one of the two ring-shaped magnets surrounding the other of the two ring-shaped magnets.

42. The method of claim 33 wherein the magnetic field is generated by a single ring-shaped magnet.

43. The method of claim 33 wherein the magnetic field is generated by a solid magnet within a ring-shaped magnet.

44. The method of claim 33 wherein the magnetic field source comprises a ring-shaped magnet within a larger ring-shaped magnet.