Contact arm and electronic device testing apparatus using the same

• US 6,456,062 B2
• Filed: 06/22/2001
• Issued: 09/24/2002
• Est. Priority Date: 06/23/2000
• Status: Expired due to Fees

• Current Assignee: Advantest Corporation
• Original Assignee: Advantest Corporation
• Inventors: Yamashita, Tsuyoshi, Kiyokawa, Toshiyuki
• Primary Examiner(s): Sherry, Michael
• Assistant Examiner(s): NGUYEN, TRUNG Q
• Application Number:
  US09/885,913
• Publication Number:
  US 20010054893A1
• Time in Patent Office: 459 Days
• Field of Search: 324/73.1, 324/158.1, 324/537, 324/700, 324/705, 324/754, 324/755, 324/758, 324/760, 324/765, 702/108, 438/14, 438/18, 414/403, 374/57, 361/700, 361/704, 361/718, 209/571, 209/573, 165/80.3, 165/80.4
• US Class Current: 324/757.01
• CPC Class Codes: G01R 31/01 Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station testing of cables continuously passing the testing apparatus G01R31/59; testing dielectric strength or breakdown voltage G01R31/12
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67

Abstract

A contact arm for bringing ICs to be tested to contact a contact portion, comprises a holding head for holding said electronic devices, a floating mechanism provided between a drive mechanism for moving close to or away from said contact portion and said holding head for supporting said holding head movable about said drive mechanism, a diaphragm cylinder provided between said drive mechanism and said holding head for adjusting a relative pressing pressure from said drive mechanism to said holding head. A plurality of diaphragm cylinders are provided to one holding head.

Claims

1. A contact arm for an electronic device testing apparatus for bringing electronic devices to be tested to contact a contact portion, comprising:

a holding head for holding said electronic devices to be tested;

a floating mechanism provided between a drive mechanism for moving close to or away from said contact portion and said holding head, for supporting said holding head movable about said drive mechanism;

a hydrostatic pressure cylinder provided between said drive mechanism and said holding head, for adjusting a relative pressing pressure from said drive mechanism to said holding head.

2. The contact arm for an electronic device testing apparatus as set forth in claim 1, wherein a plurality of said hydrostatic pressure cylinders are provided to said one holding head.

3. The contact arm for an electronic device testing apparatus as set forth in claim 2, wherein:

said floating mechanism includes a rod for supporting said holding head and a through hole formed on said drive mechanism side for said rod to penetrate; and

said one rod is provided with said one hydrostatic pressure cylinder.

4. The contact arm for an electronic device testing apparatus as set forth in claim 3, wherein said rod is made removable from said drive mechanism.

5. The contact arm for an electronic device testing apparatus as set forth in claim 2, wherein at least a holding portion of an electronic device to be tested of said holding head is made removable.

6. The contact arm for an electronic device testing apparatus as set forth in claim 1, wherein:

said floating mechanism includes a rod for supporting said holding head and a through hole formed on said drive mechanism side for said rod to penetrate; and

said one rod is provided with said one hydrostatic pressure cylinder.

7. The contact arm for an electronic device testing apparatus as set forth in claim 6, wherein said rod is made removable from said drive mechanism.

8. The contact arm for an electronic device testing apparatus as set forth in claim 1, wherein at least a holding portion of an electronic device to be tested of said holding head is made removable.