Moiré interferometer with overlapping illumination and imaging systems

• US 6,456,384 B1
• Filed: 11/09/2000
• Issued: 09/24/2002
• Est. Priority Date: 11/09/2000
• Status: Expired due to Fees

• Current Assignee: Tropel Corp. (Corning Incorporated)
• Original Assignee: Tropel Corp. (Corning Incorporated)
• Inventors: Dewa, Paul G., Platten, James E., Lindquist, Dag, Kulawiec, Andrew W.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): NATIVIDAD, PHILIP SANA
• Application Number:
  US09/710,660
• Time in Patent Office: 684 Days
• Field of Search: 396/609, 396/618, 396/512, 396/99
• US Class Current: 356/618
• CPC Class Codes: G01B 11/254 Projection of a pattern, viewing through a pattern, e.g. moiré

Abstract

A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.

Claims

1. An apparatus for measuring flatness of a test surface using moiré

topography comprising;

an illuminating system including a light source and an optical pathway for conveying light from the light source to the test surface;

an imaging system including a fringe pattern detector and an optical pathway for conveying an image of the test surface to the fringe pattern detector;

a grating pattern that is illuminated on the test surface by the illuminating system and that is imaged onto the detector by the imaging system for producing together with a reference grating pattern a moiré

fringe pattern indicate of the flatness of the test surface;

a focusing optic positioned at an intersection of the optical pathways that convey light both to and from the test surface en route from the light source to the detector;

the focusing optic being arranged as a part of the illuminating system and as a part of the illuminating system to collimate light en route to the test surface at a first angle thereby contributing to forming on the test surface a telecentric reproduction of the grating pattern; and

the focusing optic being arranged as a part of the imaging system and as a part of the imaging system to relay collimated light at a different angle from the test surface thereby contributing to forming on the detector a telecentric image of the grating pattern reproduction appearing on the test surface.

2. The apparatus of claim 1 in which the focusing optic is a reflective focusing optic.

3. The apparatus of claim 2 in which the focusing optic is a concave mirror.

4. The apparatus of claim 1 in which the grating pattern is formed by casting a shadow pattern of an actual grating onto the test surface.

5. The apparatus of claim 4 in which the focusing optic collimates light en route to the actual grating for casting a high contrast shadow pattern onto the test surface.

6. The apparatus of claim 5 in which the focusing optic gathers light from both the actual grating and the grating'"'"'s shadow pattern on the test surface for forming the moiré

fringe pattern at the detector.

7. The apparatus of claim 1 in which the grating pattern is formed by a projection of an actual grating onto the test surface.

8. The apparatus of claim 7 in which the focusing optic contributes to forming a telecentric image of the actual grating on the test surface.

9. The apparatus of claim 8 in which the focusing optic gathers light from the telecentric image of the grating pattern on the test surface and produces another telecentric image of the grating pattern on the detector.

10. The apparatus of claim 1 in which the light source is a coherent light source and the grating pattern is formed by the mechanism of interference.

11. The apparatus of claim 10 in which the focusing optic coveys coherent light to the test surface and relays an image of the grating pattern on the test surface to the detector.

12. The apparatus of claim 11 in which the coherent light is divided into two angularly related portions for producing a fringe pattern having a predetermined frequency on the test surface.

13. The apparatus of claim 1 further comprising a directional optic located along the optical pathway of the illuminating system between the focusing optic and the test surface for controlling an angle of incidence at which the grating pattern is illuminated on the test surface.

14. The apparatus of claim 13 in which the focusing optic collects light directly from the test surface and conveys light indirectly to the test surface through the directional optic.

15. The apparatus of claim 13 in which the directional optic is pivotable for adjusting the angle of incidence at which the grating pattern is illuminated on the test surface.

16. A moiré

interferometer for detecting variations in a test surface comprising;

a light source that produces a beam of light for illuminating a grating pattern on the test surface;

a focusing optic positioned to convey the beam of light oblique to the test surface;

a directional optic that redirects the oblique beam of light towards the test surface;

a fringe pattern detector that receives an image of the grating pattern appearing on the test surface;

processor that evaluates a combination of a reference grating pattern and the image of the grating pattern appearing on the test surface to detect variations in the test surface;

said focusing optic also being positioned to collect light from the test surface independent of the directional optic for relaying the image of the grating pattern appearing on the test surface to the fringe pattern detector;

a grating located between the directional optic and the test surface for casting a shadow in the form of the grating pattern on the test surface; and

the focusing optic being arranged to collect light from both the grating and its shadow on the test surface for combining the reference grating pattern with the grating pattern appearing on the test surface.

17. The interferometer of claim 16 in which the grating has a planar substrate that supports the test surface.

18. The interferometer of claim 16 in which the focusing optic is a collimating mirror.

19. A moiré

interferometer for detecting variations in a test surface comprising;

a light source that produces a beam of light for illuminating a grating pattern-on the test surface;

a focusing optic positioned to convey the beam of light oblique to the test surface;

a directional optic that redirects the oblique beam of light towards the test surface;

a fringe pattern detector that receives an image of the grating pattern appearing on the test surface;

a processor that evaluates a combination of a reference grating pattern and the image of the grating pattern appearing on the test surface to detect variations in the test surface;

said focusing optic also being positioned to collect light from the test surface independent of the directional optic for relaying the image of the grating pattern appearing on the test surface to the fringe pattern detector;

a first grating located between the light source and the focusing optic;

a projection optic for projecting an image of the first grating onto the test surface to form the grating pattern on the test surface; and

a second grating located between the focusing optic and the detector to combine the reference grating pattern with the image of the grating pattern on the test surface.

20. A moiré

interferometer for detecting variations in a test surface comprising;

a light source that produces a beam of light for illuminating a grating pattern on the test surface;

a focusing optic positioned to convey the beam of light oblique to the test surface;

a directional optic that redirects the oblique beam of light towards the test surface;

a fringe pattern detector that receives an image of the grating pattern appearing on the test surface;

a processor that evaluates a combination of a reference grating pattern and the image of the grating pattern appearing on the test surface to detect variations in the test surface;

said focusing optic also being positioned to collect light from the test surface independent of the directional optic for relaying the image of the grating pattern appearing on the test surface to the fringe pattern detector; and

the light source being arranged to produce a coherent light beam, and the grating pattern on the test surface being formed by two interfering portions of the coherent light beam.

21. The interferometer of claim 20 in which the directional optic divides the coherent light beam into the two interfering portions.

22. Apparatus for discerning surface topography with moiré

fringes comprising;

a light source that produces a light beam;

an illumination pathway that conveys the light beam to a test surface;

a grating pattern forming structure located along the illumination pathway for illuminating a grating pattern on the test surface from a first angular perspective;

an imaging pathway that relays an image of the grating pattern appearing on the test surface from a second angular perspective;

said grating pattern on the test surface being combinable with a reference grating pattern for producing the moiré

fringes;

a focusing optic located along both the illumination pathway and the imaging pathway for conveying the light beam to the test surface and for relaying the image of the grating pattern on the test surface; and

the focusing optic-being a reflective optic that reflects the light beam traveling along the illumination pathway and the image relayed along the imaging pathway at a different angle.

23. The apparatus of claim 22 in which the focusing optic is a collimator that collimates the light beam en route to the test surface.

24. The apparatus of claim 23 in which the focusing optic is a concave mirror.

25. The apparatus of claim 22 in which the grating pattern forming structure is an actual grating located along the illumination pathway between the light source and the test surface.

26. The apparatus of claim 25 in which the reference grating pattern is formed on the actual grating and the grating pattern appearing on the test surface is formed as a shadow of the actual grating.

27. The apparatus of claim 26 in which the actual grating has a planar substrate that supports the test surface.

28. The apparatus of claim 25 further comprising projection optics that cooperate with the focusing optic for projecting a telecentric image of the actual grating onto the test surface.

29. The apparatus of claim 28 in which the reference grating pattern is formed by a reference grating located along the imaging pathway.

30. The apparatus of claim 22 in which the grating pattern forming structure utilizes a mechanism of interference for forming the grating pattern on the test surface.

31. The apparatus of claim 30 further comprising a directional optic located along the illumination pathway for dividing the light beam into two interfering beams.

32. The apparatus of claim 31 in which the directional optic is located between the focusing optic and the test surface and is angularly adjustable for controlling the first angular perspective at which the grating pattern is illuminated on the test surface.

33. A method of determining the flatness of a test surface by moiré

topography comprising the steps of;

directing a light beam along an illumination pathway to the test surface;

forming a grating pattern on the test surface from a first angular perspective;

relaying an image of the grating pattern from a second angular perspective along an imaging pathway to a fringe pattern detector;

combining the grating pattern on the test surface with a reference grating pattern for producing moiré

fringes;

intersecting both the illumination pathway and the imaging pathway with a common focusing optic that conveys the light beam to the test surface and relays the image of the grating pattern to the fringe pattern detector;

using the common focusing optic to collimate the light beam en route to the test surface forming the grating pattern on the test surface from the first angular perspective as a telecentric reproduction of the grating pattern; and

using the common focusing optic to relay a telecentric image of the grating pattern appearing on the test surface from the second angular perspective to the fringe pattern detector.

34. The method a claim 33 in which the step of intersecting includes both reflecting the light beam en route to the test surface and reflecting the image of the grating pattern en route to the fringe pattern detector.

35. The method of claim 34 in which the step of intersecting includes reflecting the light beam and the image of the grating pattern at different angles.

36. The method of claim 35 including a further step of directing the reflected light beam at a predetermined angle of incidence to the test surface.

37. The method of claim 36 in which the step of directing includes reflecting the light beam from a reflective optic that is angularly adjustable for varying the angle of incidence at which the light beam illuminates the test surface.

38. The method of claim 33 in which the-step of forming the grating pattern includes positioning a grating along the illumination pathway for casting a shadow of the grating onto the test surface.

39. The method of claim 38 including the step of supporting the test surface with the grating.

40. The method of claim 33, in which the step of forming the grating pattern includes dividing the light beam into two interfering beams for producing an interference pattern on the test surface.

41. The method of claim 33 in which the step of forming includes utilizing the common focusing optic to telecentrically project the grating pattern onto the test surface.

42. The method of claim 33 in which the test surface has a defined area for evaluating fitness and including a further step of sizing a reflective area of the common focusing optic larger than the defined area of the test surface.