Microelectromechanical elevating structures
First Claim
1. A microelectromechanical (MEMS) apparatus, comprising:
- a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment; and
a MEMS device attached to the distal portion of said elevating structure at the least one zone of attachment.
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Accused Products
Abstract
A MEMS apparatus is provided that includes a microelectronic substrate and an elevating structure having a fixed portion attached to the substrate and a distal portion raised from the surface of the substrate. The distal portion of the elevating structure defines at least one zone of attachment. Additionally, the MEMS apparatus comprises a MEMS device attached to the distal portion of the elevating structure at one of the zones of attachment. The attached MEMS device may comprise an electrostatic actuator having a first and second electrode film that are attached to the elevating structure at one of the zones of attachment. In those embodiments in which the MEMS devices comprise an electrostatic actuator the force and movement provided by the actuator may be used to incorporate switches, pumps, valves or other similar MEMS devices.
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Citations
67 Claims
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1. A microelectromechanical (MEMS) apparatus, comprising:
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a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment; and
a MEMS device attached to the distal portion of said elevating structure at the least one zone of attachment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 61, 62, 63, 64, 65, 66)
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34. A microelectromechanical (MEMS) electrostatic actuator, comprising:
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a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment;
a first electrode film extending from one of said at least one zone of attachment; and
a second electrode film attached to said elevating structure at the one of said at least one zone of attachment, wherein the first and second electrode films are adapted for electrostatic actuation to controllably move relative to one another.
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35. An array of MEMS apparatus comprising:
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a microelectronic substrate having a first surface;
a plurality of elevating structures arranged in a pattern, each elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment; and
a plurality of MEMS devices attached to the distal portion of respective elevating structures at a predetermined zone of attachment.
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36. An array of MEMS electrostatic actuators comprising:
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a microelectronic substrate having a first surface;
a plurality of elevating structures arranged in a pattern, each elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment;
a first electrode film extending from one of said at least one zone of attachment of each elevating structure; and
a second electrode film attached to each of said elevating structures at the one of said at least one zone of attachment, wherein the first and second electrode films are adapted for electrostatic actuation to controllably move relative to one another.
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37. A MEMS electrostatic switch comprising:
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a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment;
a first electrode film extending from one of said at least one zone of attachment and having a first electrical contact; and
a second electrode film attached to said elevating structure at the one of said at least one zone of attachment and having a second electrical contact, wherein the first and second electrode films are adapted for electrostatic actuation to controllably move relative to one another and provide for electrical connection between said first and second contacts.
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38. A MEMS electrostatic optical attenuator comprising:
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a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment;
a first electrode film extending from one of said at least one zone of attachment; and
a second electrode film attached to said elevating structure at the one of said at least one zone of attachment and having a reflective surface, wherein the first and second electrode films are adapted for electrostatic actuation to controllably move relative to one another for the purpose of altering optical beams that are proximate to said substrate.
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39. A microelectromechanical (MEMS) apparatus, comprising:
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a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one elevating structure zone of attachment;
a MEMS device attached to the distal portion of said elevating structure at the least one zone of attachment and defining at least one MEMS device zone of attachment; and
a secondary MEMS device attached to the MEMS device zone of attachment. - View Dependent Claims (40)
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41. A microelectromechanical (MEMS) apparatus, comprising:
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a microelectronic substrate having a first surface;
an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment; and
a MEMS electrostatic actuator having a first electrode film and a second electrode film, wherein said first and second electrode films are attached to said elevating structure at the at least one zone of attachment. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 67)
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Specification