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Microelectromechanical elevating structures

  • US 6,456,420 B1
  • Filed: 07/27/2000
  • Issued: 09/24/2002
  • Est. Priority Date: 07/27/2000
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical (MEMS) apparatus, comprising:

  • a microelectronic substrate having a first surface;

    an elevating structure having a fixed portion attached to said first surface of said microelectronic substrate and a distal portion capable of being raised from said first surface of said microelectronic substrate, wherein the distal portion defines at least one zone of attachment; and

    a MEMS device attached to the distal portion of said elevating structure at the least one zone of attachment.

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