×

Vacuum processing apparatus

  • US 6,457,253 B2
  • Filed: 02/13/2001
  • Issued: 10/01/2002
  • Est. Priority Date: 08/29/1990
  • Status: Expired due to Fees
First Claim
Patent Images

1. A conveyor system for use in a vacuum processing apparatus, comprising:

  • a cassette mount table for holding a cassette; and

    a conveyor structure for transferring a wafer from the cassette held on the cassette mount table, wherein;

    the conveyor structure is provided with a transfer structure and a robot arranged on the transfer structure, the robot is disposed between the cassette mount table and at least one lock chamber connected to a vacuum loader having a vacuum processing chamber, the robot being in tandem horizontally to the cassette mount table and the at least one lock chamber, and the at least one lock chamber comprises a set of two lock chambers separately disposed.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×