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Mass sensor and mass sensing method

  • US 6,457,361 B1
  • Filed: 08/31/1999
  • Issued: 10/01/2002
  • Est. Priority Date: 09/04/1998
  • Status: Expired due to Fees
First Claim
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1. A mass sensor comprising:

  • a connecting plate having at least one of a slit, an opening portion, and a thin-walled portion and a thick-walled portion formed therein;

    a diaphragm joined with the connecting plate at respective side surfaces thereof;

    a sensing plate with a piezoelectric element being provided at least at one part on at least one surface of the sensing plate, which has its side surface joined with a side surface of said connecting plate in a direction perpendicular to the joining direction of said diaphragm and said connecting plate; and

    a sensor substrate with which at least a part of side surfaces of said connecting plate as well as said sensing plate are joined, wherein said diaphragm, said connecting plate, said sensing plate, and said piezoelectric element form a resonating portion.

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