Movement control mechanism of contact-type vibrating probe
First Claim
1. A movement control mechanism for controlling movement of a contact-type vibrating probe, the contact-type vibrating probe having a stylus defining an axis therein provided with a contact portion to be in contact with a workpiece at a tip end of the contact portion, a stylus holder for supporting the stylus, a first vibrator for resonating the stylus at frequency f1 in an axial direction, and a detector for detecting a change in vibration of the stylus by the first vibrator, the movement control mechanism comprising:
- a support body mechanically connected to the stylus holder to move in threedimensional space at a predetermined velocity vector in accordance with an external command;
a second vibrator for vibrating the stylus relative to the workpiece at frequency f2 in a direction orthogonal with the axial direction of the stylus and also normal to a surface of the workpiece; and
a controller for controlling movement of the support body so that a state of a detection signal detected by the detector in accordance with contact of the contact portion with the end surface of the workpiece remains substantially constant when the contact portion touches the end surface of the workpiece while vibrating the stylus by the second vibrator.
1 Assignment
0 Petitions
Accused Products
Abstract
A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body (23) which moves a contact-type vibrating probe (100) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector (5) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller (31) for controlling movement of the support body (23) so that change in state quantity of a detection signal detected by the detector is constant.
-
Citations
15 Claims
-
1. A movement control mechanism for controlling movement of a contact-type vibrating probe, the contact-type vibrating probe having a stylus defining an axis therein provided with a contact portion to be in contact with a workpiece at a tip end of the contact portion, a stylus holder for supporting the stylus, a first vibrator for resonating the stylus at frequency f1 in an axial direction, and a detector for detecting a change in vibration of the stylus by the first vibrator, the movement control mechanism comprising:
-
a support body mechanically connected to the stylus holder to move in threedimensional space at a predetermined velocity vector in accordance with an external command;
a second vibrator for vibrating the stylus relative to the workpiece at frequency f2 in a direction orthogonal with the axial direction of the stylus and also normal to a surface of the workpiece; and
a controller for controlling movement of the support body so that a state of a detection signal detected by the detector in accordance with contact of the contact portion with the end surface of the workpiece remains substantially constant when the contact portion touches the end surface of the workpiece while vibrating the stylus by the second vibrator. - View Dependent Claims (2, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
3. A movement control mechanism for controlling movement of a contact-type vibrating probe, the contact-type vibrating probe having a stylus defining an axis therein provided with a contact portion to be in contact with a workpiece at a tip end of the contact portion, a stylus holder for supporting the stylus, a first vibrator for resonating the stylus frequency f1 in an axial direction, and a detector for detecting a change in vibration of the stylus by the first vibrator, the movement control mechanism comprising:
-
a support body mechanically connected to the stylus holder to move in three-dimensional space at a predetermined velocity vector in accordance with an external command;
second vibrator for relatively vibrating the stylus relative to the workpiece at a frequency f2 along a surface of the workpiece; and
a controller for controlling movement of the support body or the workpiece so that a state of a detection signal detected by the detector in accordance with contact of the contact portion with the surface of the workpiece remains substantially constant when the contact portion touches the end surface of the workpiece while vibrating the stylus by the second vibrator. - View Dependent Claims (4, 5, 6)
-
Specification