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Movement control mechanism of contact-type vibrating probe

  • US 6,457,366 B1
  • Filed: 03/31/2000
  • Issued: 10/01/2002
  • Est. Priority Date: 04/02/1999
  • Status: Expired due to Term
First Claim
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1. A movement control mechanism for controlling movement of a contact-type vibrating probe, the contact-type vibrating probe having a stylus defining an axis therein provided with a contact portion to be in contact with a workpiece at a tip end of the contact portion, a stylus holder for supporting the stylus, a first vibrator for resonating the stylus at frequency f1 in an axial direction, and a detector for detecting a change in vibration of the stylus by the first vibrator, the movement control mechanism comprising:

  • a support body mechanically connected to the stylus holder to move in threedimensional space at a predetermined velocity vector in accordance with an external command;

    a second vibrator for vibrating the stylus relative to the workpiece at frequency f2 in a direction orthogonal with the axial direction of the stylus and also normal to a surface of the workpiece; and

    a controller for controlling movement of the support body so that a state of a detection signal detected by the detector in accordance with contact of the contact portion with the end surface of the workpiece remains substantially constant when the contact portion touches the end surface of the workpiece while vibrating the stylus by the second vibrator.

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