On-chip transformers

• US 6,459,352 B1
• Filed: 02/08/2001
• Issued: 10/01/2002
• Est. Priority Date: 02/08/2001
• Status: Active Grant

• Current Assignee: Skyworks Solutions Incorporated
• Original Assignee: Skyworks Solutions Incorporated
• Inventors: Howard, David, Liu, Q. Z.
• Primary Examiner(s): MAI, ANH T
• Application Number:
  US09/779,402
• Publication Number:
  US 20020105406A1
• Time in Patent Office: 600 Days
• Field of Search: 336/200, 336/223, 336/232, 296/021
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H01F 41/046 structurally combined with ferromagnetic material

Abstract

In an exemplary embodiment of the disclosed transformer, the transformer comprises a dielectric area. For example, the dielectric area can consist of three different dielectric layers. Also, by way of example, the dielectric area can comprise silicon dioxide or a low-k dielectric. According to the exemplary embodiment, the dielectric area is interspersed with a permeability conversion material. The permeability conversion material has a permeability higher than the permeability of the dielectric area. For example, the permeability conversion material can be nickel, iron, nickel-iron alloy, or magnetic oxide. The exemplary embodiment further comprises a first conductor and also a second conductor patterned into the dielectric area. The first and/or the second conductor can comprise copper, aluminum, or a copper-aluminum alloy. Each of the first and second conductors are made up of a number of turns which result in, respectively, the primary and secondary windings of the exemplary disclosed transformer.

Claims

1. A structure in a semiconductor chip, said structure comprising:

a dielectric area having a first permeability;

a permeability conversion material having a second permeability, said permeability conversion material being interspersed within said dielectric area, wherein said second permeability is greater than said first permeability;

a first conductor patterned into said dielectric area, said first conductor having a first plurality of turns;

a second conductor patterned into said dielectric area, said second conductor having a second plurality of turns.

2. The structure of claim 1 wherein said dielectric area comprises at least three dielectric layers.

3. The structure of claim 1 wherein said dielectric area comprises a plurality of dielectric layers, wherein said first conductor is in a first dielectric layer of said plurality of dielectric layers, wherein said second conductor is in a third dielectric layer of said plurality of dielectric layers, and wherein a second dielectric layer of said plurality of dielectric layers is situated between said first and third dielectric layers.

4. The structure of claim 3 wherein said plurality of dielectric layers comprise a low-k dielectric.

5. The structure of claim 3 wherein said plurality of dielectric layers comprise silicon dioxide.

6. The structure of claim 1 wherein said dielectric area comprises a low-k dielectric.

7. The structure of claim 1 wherein said permeability conversion material is selected from the group consisting of nickel, iron, nickel-iron alloy, and magnetic oxide.

8. The structure of claim 1 wherein said dielectric area comprises silicon dioxide.

9. The structure of claim 1 wherein said first conductor is selected from the group consisting of copper, aluminum, and copper-aluminum alloy.

10. The structure of claim 1 wherein said second conductor is selected from the group consisting of copper, aluminum, and copper-aluminum alloy.

11. A structure in a semiconductor chip, said structure comprising:

a first dielectric layer;

a second dielectric layer situated over said first dielectric layer, said second dielectric layer being interspersed with a permeability conversion material;

a third dielectric layer situated over said second dielectric layer;

a primary winding patterned into said first, second, and third dielectric layers;

a second winding patterned into said first, second, and third dielectric layer.

12. The structure of claim 11 wherein said primary winding comprises a plurality of interconnect metal segments in said first dielectric layer and a plurality of interconnect metal segments in said third dielectric layer.

13. The structure of claim 12 wherein a plurality of via metal segments in said second dielectric layer interconnect said plurality of interconnect metal segments in said first dielectric layer with said plurality of interconnect metal segments in said third dielectric layer.

14. The structure of claim 11 wherein said secondary winding comprises a plurality of interconnect metal segments in said first dielectric layer and a plurality of interconnect metal segments in said third dielectric layer.

15. The structure of claim 14 wherein a plurality of via metal segments in said second dielectric layer interconnect said plurality of interconnect metal segments in said first dielectric layer with said plurality of interconnect metal segments in said third dielectric layer.

16. The structure of claim 11 wherein said first dielectric layer is interspersed with a permeability conversion material.

17. The structure of claim 11 wherein said third dielectric layer is interspersed with a permeability conversion material.

18. The structure of claim 11 wherein said first and said third dielectric layers are interspersed with a permeability conversion material.

19. The structure of claim 11 wherein said permeability conversion material is selected from the group consisting of nickel, iron, nickel-iron alloy, and magnetic oxide.