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Over clamp sensor

  • US 6,459,382 B1
  • Filed: 04/26/2001
  • Issued: 10/01/2002
  • Est. Priority Date: 04/26/2001
  • Status: Expired due to Fees
First Claim
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1. A rotatable substrate support comprising:

  • a rotatable base;

    at least one moveable end effector coupled to rotate with the rotatable base and configured to selectively move between a clamped position wherein a properly positioned substrate is held in place by the end effector and an unclamped position wherein a substrate may be extracted from or received by the rotatable substrate support; and

    a sensing system having a first part coupled to the moveable end effector and a second part coupled to the rotatable base, the first part and the second part being positioned so that the sensing system detects when the moveable end effector is in an overclamp position.

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