Over clamp sensor

• US 6,459,382 B1
• Filed: 04/26/2001
• Issued: 10/01/2002
• Est. Priority Date: 04/26/2001
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Wadensweiler, Ralph M.
• Primary Examiner(s): Hofsass, Jeffery
• Assistant Examiner(s): NGUYEN, HUNG T
• Application Number:
  US09/843,505
• Time in Patent Office: 523 Days
• Field of Search: 340/686.1, 340/686.2, 340/686.3, 340/686.4, 340/686.5, 340/679, 118/666, 118/725, 118/730
• US Class Current: 340/686.1
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection

Abstract

A substrate support is provided that comprises a sensing system configured to detect when a moveable end effector is in an over clamp position. The sensing system may comprise various sensors such as an inductive sensor, a light emitter and a detector, and a pressure sensor, etc. Use of such an over clamp sensor may prevent substrate damage that results from improper substrate gripping.

Claims

1. A rotatable substrate support comprising:

a rotatable base;

at least one moveable end effector coupled to rotate with the rotatable base and configured to selectively move between a clamped position wherein a properly positioned substrate is held in place by the end effector and an unclamped position wherein a substrate may be extracted from or received by the rotatable substrate support; and

a sensing system having a first part coupled to the moveable end effector and a second part coupled to the rotatable base, the first part and the second part being positioned so that the sensing system detects when the moveable end effector is in an overclamp position.

2. The rotatable substrate support of claim 1 wherein a first one of the first part and the second part comprises an inductive sensor.

3. The rotatable substrate support of claim 2 wherein a second one of the first part and the second part comprises a flag, and further wherein the inductive sensor is configured to detect when the flag is within a predetermined distance from the inductive sensor.

4. The rotatable substrate support of claim 1 wherein a first one of the first part and the second part comprises a light emitter.

5. The rotatable substrate support of claim 4 wherein a second one of the first part and the second part comprises a light detector.

6. The rotatable substrate support of claim 1 wherein a first one of the first part and the second part comprises a light emitter and a detector.

7. The rotatable substrate support of claim 6 wherein a second one of the first part and the second part comprises a reflective surface, and further wherein the detector detects a beam of light reflected by the reflective surface when the moveable end effector is in the overclamp position.

8. The rotatable substrate support of claim 1 further comprising a controller coupled to the sensing system and configured to receive an overclamp signal output by the sensing system and to prevent processing when the overclamp signal is received.

9. The rotatable substrate support of claim 1 wherein the at least one moveable end effector comprises a plurality of moveable end effectors coupled to the rotatable base and configured to support a substrate and further comprising a plurality of sensing systems, one coupled to each of the moveable end effectors and configured to detect an overclamp condition thereof.

10. The rotatable substrate support of claim 1 wherein the sensing system detects when the moveable end effector is in an overclamp position by sensing that the moveable end effector is not in a clamped position or an unclamped position.

11. A substrate support comprising:

a base;

at least one moveable end effector coupled to the base and configured to selectively move between a clamped position wherein a properly positioned substrate is held in place by the moveable end effector and an unclamped position wherein a substrate may be extracted from or received by the substrate support; and

a sensing system having a first part coupled to the moveable end effector and a second part coupled to the base, the first part and the second part being positioned so that the sensing system detects when the end effector is in an overclamp position.

12. The substrate support of claim 11 wherein the base is rotatable and further comprising a plurality of end effectors positioned to hold a disk shaped substrate on the base and wherein the sensing system detects when the moveable end effector is in an overclamp position by sensing that the moveable end effector is not in a clamped position or an unclamped position.

13. A substrate support comprising:

a base;

at least one end effector coupled to the base and configured to selectively move between a clamped position wherein a properly positioned substrate is held in place by the end effector and an unclamped position wherein a substrate may be extracted from or received by the substrate support; and

a sensing system coupled to the base and configured to detect when the end effector is in an over clamp position.

14. The substrate support of claim 13 wherein the sensing system detects when the end effector is in an overclamp position by sensing that the end effector is not in a clamped position or an unclamped position.

15. A method comprising:

providing a base;

providing an end effector coupled to the base and configured to selectively move between a clamped position wherein a properly positioned substrate is held in place by the end effector and an unclamped position wherein a substrate may be extracted from or received by the rotatable substrate support; and

detecting when the end effector is in an overclamp position.

16. The method of claim 15 wherein detecting when the end effector is in an overclamp position comprises:

providing a flag;

providing a sensor configured to detect when the flag is within a predetermined distance from the sensor; and

monitoring the sensor to determine whether the flag is within a predetermined distance from the sensor.

17. The method of claim 16 further comprising:

generating an alarm if the flag is within a predetermined distance from the sensor.