System and method for locating irregular edges in image data

• US 6,459,807 B1
• Filed: 06/13/2000
• Issued: 10/01/2002
• Est. Priority Date: 06/13/2000
• Status: Expired due to Term

• Current Assignee: Onto Innovation Inc.
• Original Assignee: Semiconductor Technologies & Instruments Incorporated (Onto Innovation Inc.)
• Inventors: Chang, Chu-Yin, Guest, Clyde Maxwell
• Primary Examiner(s): Boudreau, Leo
• Assistant Examiner(s): CHAWAN, SHEELA C
• Application Number:
  US09/592,641
• Time in Patent Office: 840 Days
• Field of Search: 382/190, 382/199, 382/251, 382/145, 382/266, 382/300, 382/173
• US Class Current: 382/145
• CPC Class Codes: G06T 2207/10056 Microscopic image
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/12 Edge-based segmentation
• CPC Class Codes: G06T 7/62 of area, perimeter, diameter or volume

Abstract

A system for processing image data, such as an image of a die cut from a silicon wafer, is provided. The system includes an irregular edge detection system, which can locate edge data of a feature of the image data, such as the edge of a probe mark in a bond pad. A feature area calculation system is connected to the irregular edge detection system, such as by accessing data stored by the irregular edge detection system. The feature area calculation system can receive the edge data of the feature and determining the area of the feature, such as by summing normalized pixel area values. The irregular edge detection system uses interpolation to locate edges that occur between the centerpoints of adjacent pixels.

Claims

1. A system for processing image data comprising:

an irregular edge detection system locating edge data of a feature of the image data, and further comprising;

a first line detector receiving a first line of pixel data of the image data;

a second line detector receiving a second line of pixel data of the image data, wherein the pixels of the first line of pixel data are adjacent to the pixels of the second line of pixel data; and

a subtractor system coupled to the first line detector and the second line detector, the subtractor system determining the difference between brightness values of pixels of the first line of pixel data and the second line of pixel data and determining whether the difference in brightness values exceeds predetermined criteria;

a feature area calculation system coupled to the irregular edge detection system, the feature area calculation system receiving the edge data of the feature and determining the area of the feature; and

wherein the irregular edge detection system uses interpolation to locate edges that occur between the centerpoints of adjacent pixels.

2. The system of claim 1 wherein the feature area calculation system further comprises a pixel comparator operable to assign a normalized area to each of a plurality of pixels based upon brightness data of each pixel.

3. The system of claim 1 further comprising a third line detector coupled to the subtractor system, the third line detector receiving a third line of pixel data of the image data, wherein the pixels of the second line of pixel data are adjacent to the pixels of the third line of pixel data, the subtractor system determining the difference between brightness values of pixels of the first line of pixel data and the third line of pixel data and determining whether the difference in brightness values exceeds predetermined criteria.

4. The system of claim 1 wherein the irregular edge detection system further comprises a feature edge location system coupled to the subtractor system, the feature edge location system analyzing brightness values from adjacent pixels of the first line of pixel data and the second line of pixel data to interpolate an edge coordinate of an irregular edge that falls between the center points of the adjacent pixels.

5. The system of claim 4 wherein the irregular edge detection system further comprises a feature box system coupled to the feature edge location system, the feature box system receiving four or more edge coordinates and selecting a pixel range of pixels contained within the four or more edge coordinates.

6. The system of claim 2 wherein the feature area calculation system further comprises a brightness selection system coupled to the pixel comparator that provides a minimum brightness value associated with pixels that are contained entirely within a feature and a maximum brightness value associated with pixels that are entirely external to a feature.

7. The system of claim 2 wherein the feature area calculation system further comprises an area register coupled to the pixel comparator, the area register receiving the normalized area for each pixel within a pixel range and summing all normalized areas for the pixel range.

17. The system of claim 1 wherein the image data is semiconductor device image data.

18. The system of claim 17 wherein the semiconductor device image data is contact area image data.

19. The system of claim 18 wherein the contact area image data is bond pad image data.

8. A system for locating an irregular edge comprising:

a first line detector system receiving a first line of pixel data;

a second line detector system receiving a second line of pixel data adjacent to the first line of pixel data;

a subtractor system coupled to the first line detector system and the second line detector system, the subtractor system determining the difference between brightness values of the first line of pixel data and the second line of pixel data and determining whether the difference in brightness values for adjacent pixels exceeds predetermined criteria;

a third line detector system coupled to the subtractor system, the third line detector system receiving a third line of pixel data, the subtractor system determining the difference between brightness values of the first line of pixel data and the third line of pixel data and determining whether the difference in brightness values exceeds predetermined criteria; and

wherein the predetermined criteria is representative of an irregular edge.

9. The system of claim 8 further comprising a feature edge location system coupled to the subtractor system, the feature edge location system analyzing brightness values of the first line of pixel data and the second line of pixel data to interpolate an edge coordinate of an irregular edge that falls between the center points of the adjacent pixels.

10. A method for processing image data to locate one or more edges of an irregular shape comprising:

subtracting first image data from second image data to yield difference data;

analyzing the difference data to locate a delta region;

storing edge coordinate data if the delta region is located;

determining that the edge coordinate may lie within the edge region of the octangular bond pad if less than four edge coordinates have been located for the area interior to the edge region of the octangular bond pad; and

repeating the steps of subtracting, analyzing, and storing until at least four edge coordinates are stored if it is determined that the edge coordinate may lie within the edge region.

11. The method of claim 10 wherein comparing first image data to second image data comprises subtracting first pixel brightness data from second pixel brightness data for each set of pixels of two lines of corresponding pixels.

12. The method of claim 10 wherein analyzing the difference data to locate the delta region comprises analyzing the difference data to locate a dip region indicative of an irregular edge.

13. The method of claim 10 wherein analyzing the difference data to locate the delta region further comprises analyzing the difference data to interpolate an irregular edge coordinate that falls between the center points of two adjacent pixels.

14. The method of claim 10 wherein repeating the steps of subtracting, analyzing, and storing in the edge region comprises:

determining the location of a row of pixels that are adjacent to pixels in the edge region of an offset edge of the octangular bond pad;

subtracting the pixel data for the pixels in the edge region from the adjacent pixels to generate difference data;

analyzing the difference data to locate a delta region; and

storing edge coordinate data if the delta region is located.

15. The method of claim 10 further comprising:

selecting a pixel range contained within a quadrilateral bounded by the four edge coordinates; and

determining the area of the irregular shape by summing the area of pixels having a predetermined brightness value within the pixel range.

16. The method of claim 15 wherein summing the area of pixels having a predetermined brightness value within the pixel range comprises;

assigning a normalized area of 1.0 to pixels having a brightness value equal to or lower than a first predetermined value;

assigning a normalized area of 0.0 to pixels having a brightness value equal to or greater than a second predetermined value; and

interpolating the normalized area between 1.0 and 0.0 for pixels having a brightness value that is between the first predetermined value and the second predetermined value.

20. The method of claim 10 wherein the image data is semiconductor device image data.