System and method for corrective action tracking in semiconductor processing

• US 6,459,949 B1
• Filed: 10/21/1998
• Issued: 10/01/2002
• Est. Priority Date: 10/21/1998
• Status: Expired due to Term

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Black, Hang T., Morosoff, Arturo N., Lebowitz, Joseph
• Primary Examiner(s): PATEL, RAMESH B
• Application Number:
  US09/176,537
• Time in Patent Office: 1,441 Days
• Field of Search: 700/32, 700/95, 700/96, 700/99-104, 700/108, 700/109, 700/110, 700/111, 700/112, 700/113, 700/114, 700/115, 700/116, 700/117, 700/121, 702/182-186, 702/84-85, 707/104, 707/103, 707/200, 707/205, 707/9, 707/10, 707/7
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/31365 Send message to most appropriate operator as function of kind of error
• CPC Class Codes: G05B 2219/32214 Display on screen what fault and which tool and what order to repair fault
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y10S 707/99945 Object-oriented database structure processing
• CPC Class Codes: Y10S 707/99948 Application of database or data structure, e.g. distributed, multimedia, or image
• CPC Class Codes: Y10S 707/99953 Recoverability

Abstract

A system and method for recording and addressing out of control (OOC) events in a semiconductor processing line. The method includes steps of (a) opening OOC entries in an OOC database, and (b) working the OOC entries. Opening an OOC entry is performed in response to one or more OOC events in wafer lots being processed in the semiconductor processing line. A lot record addresses an isolated occurrence pertaining to one wafer lot. An issue record addresses a trend of repeated defects or failures. Opening an OOC entry in the OOC database preferably includes assigning and recording an “owner” responsible for addressing the OOC entry. Working the OOC entries includes opening activity records for the OOC entries, receiving user input on corrective measures, and recording the measures in the activity records. The method preferably also includes steps of (c) closing OOC entries after working the OOC entries, and (d) reassigning OOC entries if ownership is transferred for the entries. The system includes (a) a plurality of computer systems, including a plurality of entry terminals, (b) an OOC database coupled to the plurality of computer systems, (c) an OOC interface executing on one or more of the entry terminals and coupled to the OOC database, and (d) an OOC tracking program executing on one or more of the computer systems and coupled to the OOC database and to the OOC interface.

Claims

1. A method for correcting out of control (OOC) semiconductor fabrication events that occur within a semiconductor processing environment, the method comprising:

recording said OOC events attributed to respective wafer lots fabricated by the semiconductor processing environment;

linking a set of said OOC events to an issue record, wherein the set of said OOC events have common OOC symptoms; and

assigning an issue owner to the issue record for correcting conditions within the semiconductor processing environment responsible for causing the set of said OOC events, wherein the issue owner is responsible for overseeing measures for said correcting conditions.

2. The method of claim 1,

wherein said recording comprises opening OOC entries, wherein the OOC entries comprise lot records and issue records, and wherein opening one OOC entry includes:

(i) opening one lot record in an OOC database, wherein the lot record describes an OOC event occurring within one of said wafer lots;

or

(ii) if the OOC database comprises a plurality of lot records indicating an OOC trend, opening one issue record in the OOC database for the OOC trend, wherein the issue record comprises links to lot records indicating the OOC trend; and

the method further comprising;

working the OOC entries, wherein working one OOC entry comprises;

(i) opening one or more activity records in the OOC database, wherein the activity records are each linked to the OOC entry,

(ii) receiving user input, wherein the user input indicates measures for addressing one or more OOC events from the OOC entry, and

(iii) recording the measures for addressing the one or more OOC events from the OOC entry in the one or more activity records;

wherein each activity record indicates a status of the measures recorded in the activity record.

3. The method of claim 2, further comprising:

closing OOC entries after said working the OOC entries, wherein said closing comprises;

(i) closing a first set of activity records after the completion of the measures for addressing OOC events for the first set of activity records;

(ii) closing a first set of lot records after closing all the activity records linked to the first set of lot records; and

(iii) closing a first set of issue records after closing all the lot records and activity records linked to the first set of issue records.

4. The method of claim 2, further comprising:

closing OOC entries after said working the OOC entries, wherein said closing comprises;

(i) closing a first set of issue records;

(ii) closing a first set of lot records linked to the first set of issue records in response to closing the first set of issue records; and

(iii) closing a first set of activity records linked to the first set of issue records in response to closing the first set of issue records.

5. The method of claim 2, wherein said opening one OOC entry further comprises specifying an owner of the OOC entry in an ownership field within the OOC entry.

6. The method of claim 5, wherein the owner of the OOC is an initiator of the OOC entry.

7. The method of claim 6, wherein the OOC entry is a lot record and wherein the initiator is a lot owner.

8. The method of claim 6, wherein the OOC entry is an issue record and wherein the initiator is the issue owner.

9. The method of claim 5, further comprising:

reassigning OOC entries, wherein reassigning one OOC entry comprises designating a new owner of the OOC entry through an OOC interface and specifying the new owner in the ownership field within the OOC entry.

10. The method of claim 9, wherein the OOC interface is a graphical user interface.

11. The method of claim 9, wherein said reassigning one OOC entry further comprises:

the OOC interface updating the OOC database with information on the OOC entry, wherein the information on the OOC entry includes the new owner; and

the OOC interface notifying the new owner of said reassigning the OOC entry.

12. The method of claim 2,

wherein said opening one lot record is performed in response to one or more of:

(a) an OOC event in a new lot and (b) an OOC event in a prior lot at a new fabrication level; and

wherein said opening one lot record comprises;

logging the OOC event into a lot-tracking database for the semiconductor processing line;

providing information on the OOC event to an OOC interface; and

the OOC interface writing information on the OOC event in the lot record in the OOC database.

13. The method of claim 12, further comprising:

performing a statistical analysis of the OOC event; and

generating a summary report after said logging.

14. The method of claim 2, further comprising:

performing a statistical analysis of the lot records and issue records in the OOC database; and

generating a summary report of the OOC database in response to said performing a statistical analysis of the lot records and issue records in the OOC database.

15. The method of claim 2, further comprising an OOC interface receiving database information concerning the lot from a lot-tracking database.

16. The method of claim 2, further comprising an OOC interface receiving information concerning the lot from a user.

17. The method of claim 2, wherein each lot record comprises two or more of:

an owner field, a lot identifier field, a defect type field, a tool field, a cause of failure field, an associated image, and a corrective action field.

18. The method of claim 2, wherein each issue record comprises a link to one or more lot records and one or more of:

an owner field, a defect type field, a tool field, a cause of failure field, an associated image, and a corrective action field.

19. The method of claim 2, wherein each activity record comprises:

a list of one or more corrective actions for addressing one or more OOC events.

20. The method of claim 2, wherein each activity record comprises:

a list of one or more corrective actions for addressing one or more OOC trends.

21. A system for correcting out of control (OOC) semiconductor fabrication events which occur within a semiconductor processing environment, wherein said system comprises:

a database, comprising;

entries associated with OOC events apportioned to wafer lots or fabrication issues common among lots; and

activity records that include measures to be taken for correcting the OOC events depending on the fabrication issues to which the OOC events are apportioned;

and a tracking program adapted to selectively record or disregard an individual OOC event as am entry of the database.

22. A system for recording and addressing OOC events in a semiconductor processing line, comprising:

(a) a plurality of computer systems comprising;

a plurality of entry terminals for entering information on OOC events;

(b) an OOC database coupled to said plurality of computer systems, wherein said OOC database is configured to store;

(i) a plurality of OOC entries, wherein each OOC entry in said plurality of OOC entries comprises at least one of;

a lot record that describes OOC events for a lot in the semiconductor processing line; and

an issue record that comprises links to lot records that indicates an OOC trend, and

(ii) a plurality of activity records, wherein each activity record said plurality of activity records is linked to one OOC entry, and wherein said activity records indicate measures for addressing OOC events in the linked OOC entry; and

(c) an OOC interface executing on one or more of said entry terminals and coupled to said OOC database, wherein said OOC interface is operable to receive new OOC information, to receive measures for addressing OOC events, and to display information from said lot and issue records; and

(d) an OOC tracking program executing on one or more of said computer systems and coupled to said OOC database and to said OOC interface,

wherein said OOC tracking program is operable to open new OOC entries in said plurality of OOC entries, wherein opening one OOC entry comprises opening a lot or issue record in response to new OOC information from said OOC interface, and

wherein said OOC tracking program is operable to modify lot records and issue records in said OOC database.

23. The system of claim 22, wherein said OOC interface is comprised in said OOC tracking program.

24. The system of claim 22, wherein the OOC interface is a graphical user interface.

25. The system of claim 22, wherein said OOC tracking program is operable to close a first OOC entry in said plurality of OOC entries after the completion of all measures for addressing OOC events in all the activity records linked to said first OOC entry.

26. The system of claim 22,

wherein said OOC tracking program is operable to close a first set of activity records in said plurality of activity records after the completion of the measures for addressing OOC events for the first set of activity records;

wherein said OOC tracking program is operable to close a first set of lot records after closing all the activity records linked to the first set of lot records; and

wherein said OOC tracking program is operable to close a first set of issue records after closing all the lot records and activity records linked to the first set of issue records.

27. The system of claim 22,

wherein said OOC tracking program is operable to close a first set of issue records in response to user input through said OOC interface;

wherein said OOC tracking program is operable to close a first set of activity records linked to the first set of issue records in response to closing the first set of issue records; and

wherein said OOC tracking program is operable to close a first set of lot records linked to the first set of issue records in response to closing the first set of issue records.

28. The system of claim 22, wherein each OOC entry in said plurality of OOC entries comprises an ownership field, and wherein said tracking program is operable to specify an owner of the OOC entry in said ownership field of the OOC entry.

29. The system of claim 28, wherein for each OOC entry in said plurality of OOC entries, said tracking program is operable to specify an initiator as the owner of the OOC entry when opening the OOC entry.

30. The system of claim 28, wherein each OOC entry in said plurality of OOC entries further comprises at least one prior ownership field, and wherein said tracking program is operable to specify one prior owner of the OOC entry in each of said prior ownership fields of the OOC entry.

31. The system of claim 28,

wherein said OOC tracking program is operable to reassign OOC entries, wherein reassigning a first OOC entry in said plurality of OOC entries comprises receiving a new owner of said first OOC entry through said OOC interface and specifying the new owner in the ownership field within said first OOC entry.

32. The system of claim 31, wherein the reassigning said first OOC entry further comprises said OOC interface notifying the new owner of the reassigning said first OOC entry.

33. The system of claim 22,

wherein said OOC tracking program is operable to open a new lot record in response to one or more of:

(a) an OOC event in a new lot and (b) an OOC event in a prior lot at a new fabrication level; and

wherein opening said new lot record comprises;

logging the OOC event into a lot-tracking database for the semiconductor processing line;

providing information on the OOC event to said OOC interface; and

said OOC interface writing the information on the new OOC event in said new lot record in said OOC database.

34. The system of claim 33, further comprising:

a statistical analysis program executing on one or more of said computer systems and coupled to said user interface and to the lot-tracking database, wherein said statistical analysis program is operable to generate a summary report after logging the OOC event into a lot-tracking database.

35. The system of claim 34, wherein said statistical analysis program is operable to perform a statistical analysis of the lot records and issue records in the OOC database and to generate a summary report of the OOC database in response to the statistical analysis.

36. The system of claim 22, wherein each lot record comprises two or more of:

an owner field, a lot identifier field, a defect type field, a tool field, a cause of failure field, an associated image, and a corrective action field.

37. The system of claim 22, wherein each issue record comprises a link to a lot record and one or more of:

an owner field, a defect type field, a tool field, a cause of failure field, an associated image, and a corrective action field.

38. The system of claim 22, wherein each activity record comprises a list of one or more corrective actions for addressing one or more OOC events.

39. A computer-readable storage medium having program instructions recorded therein, wherein said program instructions are operable to implement steps for recording and addressing out of control (OOC) events in a semiconductor processing line, wherein said program instructions implement:

(a) opening OOC entries, wherein the OOC entries comprise lot records and issue records, and wherein opening one OOC entry includes;

(i) opening one lot record in an OOC database, wherein the lot record describes an OOC event for a lot in the semiconductor processing line;

or

(ii) if the OOC database comprises a plurality of lot records indicating an OOC trend, opening one issue record in the OOC database for the OOC trend, wherein the issue record comprises links to lot records indicating the OOC trend; and

(b) working the OOC entries, wherein working one OOC entry comprises;

(i) opening one or more activity records in the OOC database, wherein the activity records are each linked to the OOC entry,

(ii) receiving user input, wherein the user input indicates measures for addressing one or more OOC events from the OOC entry, and

(iii) recording the measures for addressing the one or more OOC events from the OOC entry in the one or more activity records;

wherein each activity record indicates a status of the measures recorded in the activity record.

40. The storage medium of claim 39, wherein said program instructions further implement:

closing OOC entries after said working the OOC entries, wherein said closing comprises;

(i) closing a first set of activity records after the completion of the measures for addressing OOC events for the first set of activity records;

(ii) closing a first set of lot records after closing all the activity records linked to the first set of lot records; and

(iii) closing a first set of issue records after closing all the lot records and activity records linked to the first set of issue records.

41. The storage medium of claim 39, wherein said program instructions further implement:

closing OOC entries after said working the OOC entries, wherein said closing comprises;

(i) closing a first set of issue records;

(ii) closing a first set of lot records linked to the first set of issue records in response to closing the first set of issue records; and

(iii) closing a first set of activity records linked to the first set of issue records in response to closing the first set of issue records.

42. The storage medium of claim 39, wherein each lot record comprises two or more of:

an owner field, a lot identifier field, a defect type field, a tool field, a cause of failure field, an associated image, and a corrective action field.

43. The storage medium of claim 39, wherein each issue record comprises a link to a lot record and one or more of:

an owner field, a defect type field, a tool field, a cause of failure field, an associated image, and a corrective action field.

44. The storage medium of claim 39, wherein each activity record comprises:

a list of one or more corrective actions for addressing one or more OOC events.

45. The storage medium of claim 39, wherein each activity record comprises:

a list of one or more corrective actions for addressing one or more OOC trends.