Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool

• US 6,460,404 B1
• Filed: 10/12/2000
• Issued: 10/08/2002
• Est. Priority Date: 10/12/2000
• Status: Expired due to Term

• Current Assignee: Chartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
• Original Assignee: Chartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
• Inventors: Tan, Chun Pheng, Chan, Soon Chye, Chia, Bak Hong
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Garber, Charles D.
• Application Number:
  US09/686,280
• Time in Patent Office: 726 Days
• Field of Search: 73/40, 73/492, 73/405.R
• US Class Current: 73/40
• CPC Class Codes: G01M 3/3281 removably mounted in a test cell

Abstract

A solvent delivery system for an edge bead removal tool (EBR) that detects N₂ leaks in a solvent pressure tank that surrounds a solvent bottle. A solvent bottle is surrounded by a pressure tank. The solvent bottle contains the solvent used in the EBR tool. A N₂ gas supply is connected to the pressure tank and pressurizes the inside of the pressure tank with N₂ gas. A pressure sensor is connected to the pressure tank. The pressure sensor senses the N₂ pressure inside of the pressure tank. The system board notifies an operator when the pressure sensor detects an unsatisfactory N₂ pressure condition inside the pressure tank. The solvent bottle contains a solvent. A buffer solvent is in the solvent buffer tank. A solvent level sensor is on the solvent buffer tank. The solvent level sensor is connected to the interlock circuit. Wherein the system board notifies an operator when the solvent level sensor detects an unsatisfactory buffer solvent level in the solvent tank. A buffer solvent delivery line is connected from the solvent buffer tank to a nozzle over a substrate. The interlock circuit is connected to the system user board by a circuit to board line.

Claims

1. A system for detecting N₂ leaks in a solvent pressure tank that surrounds a solvent bottle in a Edge Bead removal tool in a spin-on-glass coater;

comprising;

a) a solvent bottle surrounded by a pressure tank;

a N₂ gas-supply connected to said pressure tank and pressurizes the inside of said pressure tank and said solvent bottle with N₂ gas;

b) a pressure sensor connected to said pressure tank;

wherein said pressure sensor senses the N₂ pressure inside of said pressure tank;

said pressure sensor detects when said solvent bottle is improperly installed in said pressure tank;

said pressure sensor is connected to a interlock circuit;

said interlock circuit is connected to a system board;

wherein said system board notifies an operator when said pressure sensor detects an unsatisfactory N₂ pressure inside said pressure tank and said solvent bottle;

c) said solvent bottle contains a solvent;

a solvent delivery line connects said solvent bottle to a solvent buffer tank;

a buffer solvent in said solvent buffer tank; and

d) a buffet solvent delivery line connected from said solvent buffer tank to a nozzle over a substrate.

2. The system of claim 1 wherein a solvent level sensor on said solvent buffer tank;

said solvent level sensor connected to said interlock circuit;

said interlock circuit is connected to said system user board by a circuit to board line;

wherein said system board notifies an operator when said solvent level sensor detects an unsatisfactory buffer solvent level in said solvent tank.

3. The system of claim 1 wherein said solvent is ethyl lactate.

4. The system of claim 1 wherein said pressure tank is comprised of a top, a bottom and an o-ring;

wherein said pressure sensor detects when said o-ring is defective.

5. The system of claim 1 wherein said pressure sensor detects when said N₂ gas supply is defective.

6. The system of claim 1 wherein said buffer tank further comprises a drain valve.

7. The system of claim 1 wherein said pressure sensor is connected to said pressure tank by pressure tank to sensor line.

8. The system of claim 1 wherein said pressure sensor is connected to said interlock circuit by a sensor to interlock line.

9. The system of claim 1 wherein said interlock circuit is connected to said system user board by a circuit to board line.

10. The system of claim 1 wherein the substrate is selected from the group consisting of:

microelectronics conductor materials;

microelectronics semiconductor materials; and

microelectronics dielectric materials.

11. The system of claim 1 wherein the substrate is used in microelectronics fabrication;

microelectronics fabrication is selected from the group consisting of;

integrated circuit microelectronics fabrications;

charge coupled device microelectronics fabrications;

solar cell microelectronics fabrications;

ceramic substrate microelectronics fabrications; and

flat panel display microelectronics fabrications.

12. The system of claim 1 which further comprises:

said system detects N₂ leaks in said pressure tank that surrounds said solvent bottle in a Edge Bead removal tool in a spin-on-glass coater.

13. The system of claim 1 wherein said system is embodied in a Edge Bead removal tool in a spin-on-glass coater.

14. A system for detecting N₂ leaks in a solvent pressure tank that surrounds a solvent. bottle in a Edge Bead removal tool in a spin-on-glass coater;

comprising;

a) a solvent bottle surrounded by a pressure tank;

a N₂ gas supply connected to said pressure tank and pressurizes the inside of said pressure tank with N₂ gas;

(1) said solvent bottle contains a solvent comprised of ethyl lactate;

(2) said pressure tank is comprised of a top, a bottom and an o-ring;

b) a pressure sensor connected to said pressure tank;

wherein said pressure sensor senses the N₂ pressure inside of said pressure tank;

said pressure sensor is connected to a interlock circuit;

said interlock circuit is connected to a system board;

wherein said system board notifies an operator when said press sensor detects an unsatisfactory N₂ pressure inside said pressure tank;

said pressure sensor is a digital pressure sensor;

(1) said pressure sensor is connected to said pressure tank by pressure tank to sensor line;

(2) said pressure sensor is connected to said interlock circuit by a sensor to interlock line;

c) said solvent bottle contains a solvent;

a solvent delivery line connects said solvent bottle to a solvent buffer tank;

said buffer solvent in said solvent buffer tank;

(1) said buffer tank further comprises a drain valve;

d) a solvent level sensor on said solvent buffer tank;

said solvent level sensor connected to said interlock circuit;

said interlock circuit is connected to said system user board by a circuit to board line;

wherein said system board notifies an operator when said solvent level sensor detects an unsatisfactory buffer solvent level in said solvent tank;

e) a buffer solvent delivery line connected from said solvent buffer tank to a nozzle over a substrate;

wherein said pressure sensor detects when said N₂ gas supply is defective;

and wherein said pressure sensor detects when said solvent bottle is improperly installed in said pressure tank.

15. The system of claim 14 which further comprises:

said system detects N₂ leaks in said pressure tank that surrounds said solvent bottle in a Edge Bead removal tool in a spin-on-glass coater.

16. The system of claim 14 wherein said system is embodied in a Edge Bead removal tool in a spin-on-glass coater.