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Electronically controlled vacuum pump

  • US 6,461,113 B1
  • Filed: 12/03/1999
  • Issued: 10/08/2002
  • Est. Priority Date: 09/13/1988
  • Status: Expired due to Fees
First Claim
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1. A vacuum system comprising, as an integral assembly:

  • a turbomolecular pump with a drive motor;

    a purge valve for introducing purge gas into the turbomolecular pump;

    a roughing valve for opening a foreline of the turbomolecular to a roughing pump; and

    an electronic control module having a programmed processor for controlling the turbomolecular pump drive motor, purge valve, and roughing valve, the processor being user programmable for establishing specific control sequences, the electronic control module being integral with but removable from the assembly and being connected to the turbomolecular pump drive motor, purge valve and roughing valve through a common connector assembly.

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