Micromechanical cap structure and the respective manufacturing method

• US 6,462,392 B1
• Filed: 02/05/2001
• Issued: 10/08/2002
• Est. Priority Date: 02/04/2000
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Emmerich, Harald, Baumann, Helmut, Pinter, Stefan, Trah, Hans-Peter
• Primary Examiner(s): NGO, NGAN V
• Application Number:
  US09/776,839
• Time in Patent Office: 610 Days
• Field of Search: 257/415, 257/417, 257/418, 257/419, 257/420
• US Class Current: 257/420
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: B81C 2203/0163 Reinforcing a cap, e.g. with ribs
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details

Abstract

A micromechanical cap structure and a corresponding manufacturing method are described, the cap structure having a substrate, in particular in the form of a wafer, having a cavity made therein. The cavity includes a bottom surface and two pairs of opposite parallel side wall sections. The cavity has at least one stabilizing wall section, which connects two side wall sections. This considerably increases the stability of the cap structure.

Claims

1. A micromechanical cap structure, comprising:

a substrate including a cavity, the cavity including a bottom surface and two pairs of opposite, parallel side wall sections, wherein;

the cavity includes at least one stabilizing wall section that connects two of the side wall sections to each other.

2. The micromechanical structure according to claim 1, wherein:

the substrate includes a wafer.

3. The micromechanical cap structure according to claim 1, wherein:

the cavity has a rectangular shape.

4. The micromechanical cap structure according to claim 1, wherein:

the at least one stabilizing wall section includes two crossing stabilizing wall sections that run parallel to the side wall sections over the bottom surface.

5. The micromechanical cap structure according claim 1, wherein:

the at least one stabilizing wall section is lowered with respect to a peripheral contour of the cavity.

6. The micromechanical cap structure according to claim 1, wherein:

the at least one stabilizing wall section includes two pairs of opposite parallel stabilizing wall sections arranged along a peripheral contour of the cavity and connecting adjacent side wall sections to provide an octagonal shape to the cavity.

7. The micromechanical cap structure according to claim 6, wherein the octagonal shape includes internal angles equal to 135°

.

8. The micromechanical cap structure according to claim 1, wherein:

the substrate corresponds to a silicon substrate,

the bottom surface includes a plane, and

the side wall sections are planes.