Eddy current sensor

• US 6,462,536 B1
• Filed: 12/15/1999
• Issued: 10/08/2002
• Est. Priority Date: 06/21/1997
• Status: Expired due to Fees

• Current Assignee: Micro-Epsilon Messtechnik GmbH & Co., KG
• Original Assignee: Micro-Epsilon Messtechnik GmbH & Co., KG
• Inventors: Mednikov, Felix, Wisspeintner, Karl
• Primary Examiner(s): Snow, Walter E.
• Application Number:
  US09/446,034
• Time in Patent Office: 1,028 Days
• Field of Search: 324/207.11, 324/207.13, 324/207.16, 324/207.24, 324/207.25, 733/13, 336/200, 336/45
• US Class Current: 324/207.16
• CPC Class Codes: G01D 5/202 by movable a non-ferromagnetic conductive element G01D5/2033 takes precedence

Abstract

Eddy current sensor with an exploring coil (2) wound on a coil form (32), with two terminals (6, 7), a source of ac voltage, an electrically conductive measuring probe (3), and an evaluation circuit, wherein the measuring probe (3) is displaceable relative to the exploring coil (2), and the evaluation circuit generates an evaluation signal as a function of the position of the measuring probe (3), wherein the eddy current sensor comprises an electrode (4) with a tap (8) for enabling electrical contact, the electrode forming together with the windings of the exploring coil (2) and an intermediate layer (33) a component with distributed electromagnetic parameters, whose output signals are used to determine the position of the measuring probe (3).

Claims

1. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically,conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the coil form is constructed as said electrode and comprises a material with little electrical resistance.

2. The eddy current sensor of claim 1 wherein the electrode is designed and constructed as a conductor or printed circuit board and arranged parallel to the axis of exploring coil.

3. The eddy current sensor of claim 1 wherein the intermediate layer is an insulating layer of the winding wire of exploring coil.

4. The eddy current sensor of claim 1 wherein the electrical resistance of the intermediate layer has a negative or positive temperature coefficient.

5. The eddy current sensor of claim 1, wherein the measuring probe is arranged inside the coil form for displacement in a channel arranged parallel to the coil axis.

6. The eddy current sensor of claim 1, wherein the electrode, the intermediate layer, and the coil form are each aligned with their longitudinal axes parallel to the axis of the exploring coil, and/or where the deflection of the measuring probe occurs parallel to the axis of the measuring coil.

7. The eddy current sensor of claim 1, wherein the tap of the electrode connects to ground.

8. An eddy current sensor comprising

an electrically conductive exploring coil which defines a length direction and includes two terminals,

an electrode extending in the length direction adjacent the exploring coil, said electrode including a tap for enabling electrical contact,

an intermediate electrically insulating layer positioned between the exploring coil and the electrode,

an electrically conductive measuring probe having an annular configuration so as to at least partially surround the exploring coil and being mounted for movement along the length direction,

a source of ac voltage connected to the two terminals of the exploring coil, and

an evaluation circuit connected to the tap of the electrode for generating an output signal as a function of the position of the measuring probe along the length of the exploring coil.

9. The eddy current sensor of claim 8, wherein the exploring coil further includes a center tap, and the sensor further comprises an operation amplifier connected to the tenter tap.

10. An eddy current sensor comprising

an electrically conductive exploring coil which defines a length direction and includes two terminals,

an electrode extending in the length direction adjacent the exploring coil, said electrode including a tap for enabling electrical contact,

an intermediate electrically insulating layer positioned between the exploring coil and the electrode,

an electrically conductive measuring probe having an annular configuration so as to at least partially surround the exploring coil and being mounted for movement along the length direction,

a source of ac voltage connected to one of the two terminals of the exploring coil or to the tap, and

an evaluation circuit connected to the other of the two terminals of the exploring coil for generating an output signal as a function of the position of the measuring probe along the length of the exploring coil.

11. The eddy current sensor of claim 10, wherein the source of ac voltage is connected to the one of the two terminals of the exploring coil, and the other of the two terminals and the tap are connected to ground.

12. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the coil form forms an insulator, and further comprising a casing surrounding the exploring coil.

13. The eddy current sensor of claim 12, wherein the casing is made from a conductive, nonferromagnetic material.

14. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the electrical resistance value of the electrode is much smaller per unit of length than the impedance of the exploring coil per unit of length.

15. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the measuring probe is an electrically conductive ring surrounding the exploring coil.

16. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the coil form forms a closed ring or a tube, and where the measuring probe is supported for displacement along the ring or tube for detecting angular changes.

17. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein both terminals of the exploring coil connect to a source of ac voltage, and where the evaluation circuit comprises an operation amplifier, whose inverting input connects to the tap of the electrode.

18. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances, whose output signals are used to determine the position of measuring probe, and wherein between the tap of the electrode and a terminal of the exploring coil an ac voltage is applied, and where the second terminal of the exploring coil connects to an inverting input of an operation amplifier of the evaluation circuit.

19. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the exploring coil comprises a further terminal in the form of a center tap of the exploring coil, which connects via a low-pass filter to an inverting input of an operation amplifier.

20. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein the exploring coil comprises bare wires that are wound at a certain distance from one another.

21. Eddy current sensor comprising an exploring coil having windings wound on a coil form and two terminals, a source of ac voltage, an electrically conductive measuring probe, and an evaluation circuit, wherein the measuring probe is displaceable relative to the exploring coil, and the evaluation circuit generates an evaluation signal as a function of the position of measuring probe, and wherein the eddy current sensor further comprises an electrode with a tap for enabling electrical contact, the electrode forming together with the windings of the exploring coil and an intermediate electrically insulating layer a component with complex impedances whose output signals are used to determine the position of measuring probe, and wherein all components of the sensor are miniaturized on a chip, which comprises a magnetoresistive or photoresistive structure.