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Acceleration sensor

  • US 6,463,804 B2
  • Filed: 05/25/2001
  • Issued: 10/15/2002
  • Est. Priority Date: 12/27/1993
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor including:

  • a base; and

    an acceleration detection element of capacitance type mounted on said base, said acceleration detection element having a movable electrode of silicon mounted adjacent a fixed electrode such that acceleration of the sensor in a measurement direction causes said movable electrode to move relative to said fixed electrode, said acceleration detection element further including plural end faces for at least partially surrounding said movable electrode and said fixed electrode, at least one of said plural end faces extending in a direction substantially parallel to the direction of acceleration detectable by motion of said movable electrode;

    wherein said acceleration detection element is mounted on said base such that said at least one of said plural end faces extending in the direction substantially parallel to the direction of acceleration lies on said base.

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