Methods for applying fluid through a brush interflow distributor

• US 6,464,796 B2
• Filed: 05/25/2001
• Issued: 10/15/2002
• Est. Priority Date: 07/09/1998
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Vail, Jim, Wallis, Mike
• Primary Examiner(s): EL ARINI, ZEINAB
• Application Number:
  US09/866,031
• Publication Number:
  US 20020066468A1
• Time in Patent Office: 508 Days
• Field of Search: 134/6, 134/9, 134/15, 134/34, 134/36, 134/42, 15/77, 15/24, 15/883, 151/02, 151/035
• US Class Current: 134/6
• CPC Class Codes: B08B 1/32 using rotary cleaning members
• CPC Class Codes: B08B 1/34 rotating about an axis parallel to the surface
• CPC Class Codes: B08B 3/02 Cleaning by the force of jets or sprays
• CPC Class Codes: H01L 21/67046 using mainly scrubbing means, e.g. brushes
• CPC Class Codes: Y10S 118/15 Roller structure

Abstract

A method of applying a fluid to a brush is provided. The method includes outputting a flow of fluid from a shaft to an area between the shaft and a distributor where the flow of fluid is restricted by the distributor to generate a uniform pressure buildup inside of the distributor. The method further includes delivering the fluid from the area through at least one opening in the distributor to an outer surface of the distributor where the outer surface of the distributor abuts an inner surface of a housing. The method additionally includes dispensing the fluid from between the outer surface of the distributor and the inner surface of the housing to an outer surface of the housing through at least one perforation in the housing, the housing being attached to a brush. The method also includes applying the fluid through the brush where the fluid is received from the outer surface of the housing. The uniform pressure buildup inside of the distributor enables the brush from end to end to receive an approximate equal amount of liquid.

Claims

1. A method of applying a fluid to a brush comprising:

outputting a flow of fluid from a shaft to an area between the shaft and a distributor, the flow of fluid being restricted by the distributor to generate a uniform pressure buildup inside of the distributor;

delivering the fluid from the area through at least one opening in the distributor to an outer surface of the distributor, the outer surface of the distributor abutting an inner surface of a housing;

dispensing the fluid from between the outer surface of the distributor and the inner surface of the housing to an outer surface of the housing through at least one perforation in the housing, the housing being attached to a brush; and

applying the fluid through the brush, the fluid being received from the outer surface of the housing;

wherein the uniform pressure buildup inside of the distributor enables the brush from end to end to receive an approximate equal amount of liquid.

2. A method of applying a fluid to a brush as recited in claim 1, wherein the distributor is elongated.

3. A method of applying a fluid to a brush as recited in claim 1, wherein the region formed by the outer surface of the distributor and the inner surface of a housing is a slot matrix.

4. A method of applying a fluid to a brush as recited in claim 1, wherein the at least one opening and the at least one perforation are circular holes.

5. A method of applying a fluid to a brush as recited in claim 1, wherein the fluid is a cleaning solution.

6. A method of applying a fluid to a brush as recited in claim 1, wherein the applying includes transferring the fluid from the brush to a wafer.

7. A method of applying a fluid to a brush as recited in claim 1, wherein the brush is made of polyurethane.

8. A method of applying a fluid to a brush as recited in claim 1, wherein the outer surface of the distributor is defined from a slot matrix.

9. A method of applying a fluid to a brush as recited in claim 8, wherein the slot matrix includes at least one longitudinal slot and at least one annular slot.

10. A method of applying a fluid to a brush as recited in claim 1, wherein the shaft has a central cavity.

11. A method of applying a fluid to a brush, comprising:

inputting a fluid into a distributor;

transporting the fluid from the distributor to an inside of a housing, the housing having an inner surface and an outer surface; and

outputting the fluid from the inside of the housing out to a brush mounted on the outer surface of the housing;

wherein the distributor evenly supplies fluid through the housing to the brush to allow consistent fluid distribution over a surface of the brush.

12. A method of applying a fluid to a brush as recited in claim 11, wherein the distributor having a slot matrix formed in an outer surface thereof, the distributor being elongated and having at least one perforation, the slot matrix including at least one longitudinal slot and at least one annular slot.

13. A method of applying a fluid to a brush as recited in claim 12, wherein the distributor implements the at least one longitudinal slot and the at least one annular slot of the slot matrix to accomplish the even supplying.

14. A method of applying a fluid to a brush as recited in claim 11, wherein the housing comprises at least one housing perforation, and the inner surface of the housing abuts the distributor and receives the fluid.

15. A method of applying a fluid to a brush as recited in claim 11, wherein the brush is a polyurethane material.

16. A method of applying a fluid to a brush, comprising:

inputting a fluid into a distributor, the distributor having a slot matrix formed in an outer surface thereof, the distributor being elongated and having at least one perforation, the slot matrix including at least one longitudinal slot and at least one annular slot;

transporting the fluid from the distributor to an inside of a housing having an inner surface and an outer surface, the housing comprising at least one housing perforation, the inner surface of the housing abutting the distributor; and

outputting the fluid from the inside of the housing out to a brush mounted on the outer surface of the housing;

wherein the distributor implements the at least one longitudinal slot and the at least one annular slot of the slot matrix to supply fluid through the housing to the brush.