Contamination controlling method and apparatus for a plasma processing chamber

• US 6,464,843 B1
• Filed: 08/03/1999
• Issued: 10/15/2002
• Est. Priority Date: 03/31/1998
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Schoepp, Alan M., Wicker, Thomas E., Maraschin, Robert A.
• Primary Examiner(s): Ryan, Patrick
• Assistant Examiner(s): Cantelmo, Gregg
• Application Number:
  US09/365,885
• Time in Patent Office: 1,169 Days
• Field of Search: 156/345, 204/298.07, 204/298.11, 204/298.15, 204/192.12, 204/298.37, 204/192.35, 204/298.31, 204/298.06, 204/298.02, 118/723.I, 118/721, 216/67, 216/68, 427/569, 427/585, 427/595, 266/664
• US Class Current: 204/192.15
• CPC Class Codes: H01J 2237/022 Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings

Abstract

A plasma processing chamber includes a substrate holder and a member of silicon carbide such as a liner, focus ring, perforated baffle or a gas distribution plate, the member having an exposed surface adjacent the substrate holder and the exposed surface being effective to minimize contamination during processing of substrates. The chamber can include an antenna which inductively couples RF energy through the gas distribution plate to energize process gas into a plasma state.

Claims

1. A method of processing a substrate and reducing metal and/or particle contamination thereof comprising steps of:

(a) placing a substrate on a substrate holder in a processing chamber, the processing chamber including at least one member having an exposed surface adjacent the substrate, the member comprising a silicon carbide based material;

(b) processing the substrate by supplying process gas to the processing chamber and energizing the process gas into a plasma state in the processing chamber, the silicon carbide member being exposed to the plasma and providing a ground path for RF current sustaining the plasma;

(c) removing the substrate from the processing chamber; and

(d) consecutively processing additional substrates in the processing chamber by repeating steps (a-c) while minimizing particle contamination of the substrates during the processing step as a result of reduction of plasma potential on the silicon carbide member and/or reduced sputtering of non-silicon carbide chamber interior surfaces, the silicon carbide member comprising a liner inside the processing chamber and forming a sidewall of the processing chamber, and the liner being a separate piece attached to an electrically grounded part of the chamber providing electrical grounding of the liner.

2. The method according to claim 1, wherein the process gas comprises one or more hydrofluorocarbon gases.

3. The method according to claim 1, wherein the plasma comprises a high density plasma and each of the substrates are processed by etching an oxide layer on the substrates with the high density plasma while supplying an RF bias to the substrates.

4. The method according to claim 1, wherein the silicon carbide member further comprises a gas distribution plate supplying the process gas to the processing chamber, a perforated baffle extending between the substrate holder and the liner, a focus ring surrounding the substrate or combination thereof, the exposed surface of the silicon carbide member minimizing particle generation by formation of gaseous SiC₄.

5. The method according to claim 3, wherein the processing chamber includes a planar antenna powered at 200 to 5000 watts and the RF bias is 1000 to 2500 watts.

6. The method according to claim 1, wherein the silicon carbide member consists essentially of a composite wherein a coating of SiC forms the exposed surface of the silicon carbide member, the exposed surface of the silicon carbide member minimizing particle generation by formation of gaseous SiC₄.

7. The method according to claim 1, wherein the silicon carbide member further comprises a baffle, the liner surrounding the substrate holder and the baffle comprising a ring extending between the liner and the substrate holder, the liner being heated to a temperature above room temperature during the processing step.

8. The method according to claim 1, wherein the chamber includes a substantially planar dielectric window and a silicon carbide gas distribution plate having sufficient electrical resistivity to make the silicon carbide gas distribution plate an insulating material, the processing chamber including an antenna adjacent the window coupling RF energy into the chamber through the window and the gas distribution plate.

9. The method according to claim 8, wherein the liner has a resistivity below 200 Ω

·

cm, the exposed surface of the silicon carbide member minimizing particle generation by formation of gaseous SiC₄.

10. The method according to claim 1, wherein the silicon carbide member comprises CVD SiC which erodes as a gas due to contact with the plasma.

11. The method according to claim 1, wherein during step (b) contact holes or vias are etched into a dielectric layer on the substrate, the contacts or vias having aspect ratios ranging from 2:

1 to 7;

1.

12. The method according to claim 1, wherein the process gas comprises 10 to 200 sccm CHF₃, 10 to 100 sccm C₂H₅, and/or 10 to 100 sccm C₂F₆.

13. The method according to claim 1, wherein the liner comprises reaction bonded silicon carbide infiltrated with molten Si.

14. The method according to claim 1, wherein the liner comprises a bulk member formed by CVD.

15. The method according to claim 1, wherein the liner is surrounded by a heated member, the method further comprising heating the liner to a desired temperature with heat generated by the heated member.

16. A plasma processing chamber comprising:

a substrate holder for supporting a substrate within an interior of the processing chamber;

at least one member having an exposed surface adjacent the substrate, the member comprising a silicon carbide based material having a density of at least 3.1 g/cm³ and including at least 99 wt % carbon and silicon, the member comprising a liner inside the processing chamber and forming a sidewall of the processing chamber wherein the liner is a separate piece attached to an electrically grounded part of the chamber providing electrical grounding of the liner;

a gas supply supplying process gas to the interior of the processing chamber; and

an energy source supplying energy into the interior of the processing chamber and energizing the process gas into a plasma state for processing a substrate, the silicon carbide member minimizing particle contamination of substrates during plasma processing thereof as a result of reduction of plasma potential on the silicon carbide member and/or reduced sputtering of non-silicon carbide chamber interior surfaces.

17. The plasma processing chamber according to claim 16, wherein the liner is surrounded by a heated member which maintains the liner at a desired temperature.

18. The plasma processing chamber according to claim 16, wherein the processing chamber includes a substantially planar dielectric window and the energy source comprises an antenna adjacent the window, the antenna supplying RF power through the window to energize process gas in the processing chamber into a plasma state.

19. The plasma processing chamber according to claim 16, wherein the silicon carbide member further comprises a gas distribution plate, a focus ring, a perforated baffle between the substrate holder and the liner or combination thereof.

20. The plasma processing chamber according to claim 16, wherein the liner comprises a cylindrical and/or conical liner forming a sidewall of the processing chamber.

21. The plasma processing chamber according to claim 16, wherein the silicon carbide member further comprises a SiC baffle ring.

22. The plasma processing chamber according to claim 17, wherein the silicon carbide member further comprises a SiC baffle ring in contact with the liner and/or the heated member.

23. The plasma processing chamber according to claim 16, wherein the silicon carbide member consists essentially of a composite wherein a coating of SiC forms the exposed surface of the silicon carbide member.

24. The plasma processing chamber according to claim 16, further comprising a SiC gas distribution plate, the gas distribution plate having sufficient resistivity to make the gas distribution plate an insulating material.

25. The plasma processing chamber according to claim 24, wherein the silicon carbide member has a resistivity of at least about 5×

10⁴ Ω

·

cm.

26. The plasma processing chamber according to claim 16, wherein the silicon carbide member comprises CVD SiC.

27. The plasma processing chamber according to claim 24, wherein the processing chamber includes a substantially planar dielectric window and the energy source comprises an antenna adjacent the window, the antenna supplying RF power through the window to energize process gas in the processing chamber into a plasma state.

28. A plasma processing chamber comprising:

a substrate holder for supporting a substrate within an interior of the processing chamber;

at least one member having an exposed surface adjacent the substrate, the member comprising a silicon carbide based material having a density of at least 3.1 g/cm³ and including at least 99 wt % carbon and silicon, the member comprising a liner inside the processing chamber and forming a sidewall of the processing chamber wherein the liner is a separate piece attached to an electrically grounded part of the chamber providing electrical grounding of the liner;

a gas supply supplying process gas to the interior of the processing chamber; and

an energy source comprising an antenna supplying energy into the interior of the processing chamber, the antenna supplying the energy through a substantially planar dielectric window, and energizing the process gas into a plasma state for processing a substrate, the silicon carbide member minimizing particle contamination of substrates during plasma processing thereof as a result of reduction of plasma potential on the silicon carbide member and/or reduced sputtering of non-silicon carbide chamber interior surfaces.