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Integrated monolithic microfabricated electrospray and liquid chromatography system and method

  • US 6,464,866 B2
  • Filed: 12/21/2000
  • Issued: 10/15/2002
  • Est. Priority Date: 09/17/1998
  • Status: Expired due to Term
First Claim
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1. An integrated chemical analysis system, comprising:

  • a first substrate having a major surface;

    a second substrate attached to said first substrate;

    a liquid chromatography system formed at least in part by reactive-ion etching and integrated in at least one of said first and said second substrates, said liquid chromatography system configured to receive a fluid for analysis and to process and dispense said fluid; and

    an electrospray device formed at least in part by reactive-ion etching and integrated on said first substrate, said electrospray device having an injection surface configured to receive said processed fluid from said liquid chromatography system, said major surface being configured to electrospray said fluid.

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