Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus
First Claim
Patent Images
1. A method of inspecting or measuring a sample using a charged-particle beam image comprising:
- an inspecting or measuring step of scanning, while irradiating, a converged charged-particle beam on a sample at least partially covered with an insulation film, detecting charged-particles which are released from the sample due to the irradiation and scanning of the charged-particle beam, thereby producing a charged-particle image, and processing the produced charged-particle image, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory; and
a conduction rendering step of irradiating the sample with a UV light to energize electrons in the insulation film of the sample so as to make the insulation film conductive, thereby causing charges to flow out of the sample.
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Abstract
A method and an apparatus for inspecting or measuring a sample based on charged-particle beam are provided to relieve charge-up of the sample, so that high-quality electron image is obtained. A UV light irradiation optical system is controlled by an irradiation controller, scanning of the charged-particle beam is controlled by a scanning controller, and the irradiation controller and the scanning controller are controlled by a general controller. They are mutually synchronized, and a signal from an electron detector is imaged by an image slicing circuit and an image processing circuit.
82 Citations
25 Claims
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1. A method of inspecting or measuring a sample using a charged-particle beam image comprising:
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an inspecting or measuring step of scanning, while irradiating, a converged charged-particle beam on a sample at least partially covered with an insulation film, detecting charged-particles which are released from the sample due to the irradiation and scanning of the charged-particle beam, thereby producing a charged-particle image, and processing the produced charged-particle image, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory; and
a conduction rendering step of irradiating the sample with a UV light to energize electrons in the insulation film of the sample so as to make the insulation film conductive, thereby causing charges to flow out of the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An inspecting or measuring method using a charged-particle beam image comprising the steps of:
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irradiating and scanning a converged charged-particle beam on a sample at least partially covered with an insulation film;
detecting charged-particles which are released from the sample due to the irradiation and scanning of the charged-particle beam, thereby producing a charged-particle image;
processing the produced charged-particle image, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory; and
irradiating the sample with a UV light to energize electrons in the insulation film of the sample, thereby making the insulation film conductive. - View Dependent Claims (11, 12, 13, 14)
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15. An apparatus for inspecting or measuring a sample using a charged-particle beam image comprising:
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a stage for placing of a sample having an insulation film;
a charged-particle source;
a charged-particle beam focusing system which converges a charged-particle beam emitted by said charged-particle source;
a scanning unit which deflects the charged-particle beam converged by said charged-particle beam focusing system to irradiate and scan the charged-particle beam to the sample placed on said stage;
an imaging unit which detects charged-particles released from the sample due to the irradiation and scanning of the charged-particle beam by said scanning unit, thereby producing a charged-particle image;
an image processing unit which processes the charged-particle image produced by said imaging unit, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory; and
UV light irradiation unit which irradiates the sample with a UV light to energize electrons in the insulation film of the sample, thereby making the insulation film conductive. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A charged-particle beam apparatus comprising:
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a stage for placing a sample;
a charged-particle source;
a charged-particle beam focusing system which converges a charged-particle beam emitted by said charged-particle source;
a scanning unit which deflects the charged-particle beam converged by said charged-particle beam focusing system to irradiate and scan the charged-particle beam to the sample placed on said stage;
a detector which detects charged-particles released from the sample due to the irradiation and scanning of the charged-particle beam;
an imaging unit which produces a charged-particle image of the sample using a signal of charged-particles detected by said detector;
a barrel unit which accommodates said stage, said charged-particle source, said charged-particle beam focusing system, said scanning unit, and said detector; and
a UV light projection unit which projects a UV light to the interior of said barrel unit. - View Dependent Claims (23, 24, 25)
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Specification