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Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus

  • US 6,465,781 B1
  • Filed: 06/08/2000
  • Issued: 10/15/2002
  • Est. Priority Date: 06/11/1999
  • Status: Expired due to Term
First Claim
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1. A method of inspecting or measuring a sample using a charged-particle beam image comprising:

  • an inspecting or measuring step of scanning, while irradiating, a converged charged-particle beam on a sample at least partially covered with an insulation film, detecting charged-particles which are released from the sample due to the irradiation and scanning of the charged-particle beam, thereby producing a charged-particle image, and processing the produced charged-particle image, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory; and

    a conduction rendering step of irradiating the sample with a UV light to energize electrons in the insulation film of the sample so as to make the insulation film conductive, thereby causing charges to flow out of the sample.

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