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Compensation component and process for producing the compensation component

  • US 6,465,869 B2
  • Filed: 05/30/2001
  • Issued: 10/15/2002
  • Est. Priority Date: 05/30/2000
  • Status: Expired due to Term
First Claim
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1. A compensation component, comprising:

  • a trough-shaped trench having side surfaces and a bottom surface;

    two active zones; and

    a drift path disposed between said two active zones, said drift path having a stacked sequence of layers of p-conducting and n-conducting regions, and said drift path with said p-conducting and n-conducting regions extended along said side surfaces and said bottom surface of said trench.

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