High resolution current sensing apparatus
First Claim
1. A current sensor comprising:
- a plurality of current sensing modules, each module including a deflectable sensing structure and a readout element coupled to the sensing structure for generating an output signal as a function of deflection of the sensing structure;
an input bus coupled to the sensing structures for applying a current to be measured;
an output bus coupled to the sensing structures for receiving the current to be measured; and
a readout bus coupled to the readout elements to detect the output signals.
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Abstract
A current sensor includes a deflectable member disposed in a magnetic field. Nulling or compensating members may be mechanically coupled to the deflectable member. Feedback or readout devices coupled to the structure provide signals indicative of deflection of the deflectable member under the influence of applied current and the magnetic field. Nulling current applied to the nulling members tends to oppose deflection of the deflectable member. The nulling current may be modulated to drive the feedback signal to a desired level and is used as a basis for calculating the current to be measured. The current may be measured directly upon calibration of feedback devices coupled to the deflectable member or to the nulling members. Arrays of sensors may be coupled to common busses for applying measured and nulling currents to sensors of the arrays and for detecting feedback signals.
29 Citations
6 Claims
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1. A current sensor comprising:
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a plurality of current sensing modules, each module including a deflectable sensing structure and a readout element coupled to the sensing structure for generating an output signal as a function of deflection of the sensing structure;
an input bus coupled to the sensing structures for applying a current to be measured;
an output bus coupled to the sensing structures for receiving the current to be measured; and
a readout bus coupled to the readout elements to detect the output signals. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification