Planar inductor
First Claim
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1. A planar inductor, comprising:
- a planar inductance element comprising a plurality of windings, the plurality of windings all extending in the same plane; and
at least one ferromagnetic layer stacked on said planar inductance element;
wherein said at least one ferromagnetic layer comprises a plurality of ferromagnetic sub-layers which are stacked upon one another and form said ferromagnetic layer and have no electrically conductive material between them; and
wherein an effective permeability μ
10 k at a frequency of 10 kHz of said at least one ferromagnetic layer is not less than 1×
104.
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Abstract
A planar inductor has a spiral coil, insulating layers stacked on both surfaces of the spiral coil, and ferromagnetic layers stacked on the insulating layers, wherein each ferromagnetic layer has a saturation magnetization 4πMs of 10 kG or more, and a thickness of 100 μm or less.
24 Citations
27 Claims
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1. A planar inductor, comprising:
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a planar inductance element comprising a plurality of windings, the plurality of windings all extending in the same plane; and
at least one ferromagnetic layer stacked on said planar inductance element;
wherein said at least one ferromagnetic layer comprises a plurality of ferromagnetic sub-layers which are stacked upon one another and form said ferromagnetic layer and have no electrically conductive material between them; and
wherein an effective permeability μ
10 k at a frequency of 10 kHz of said at least one ferromagnetic layer is not less than 1×
104.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
a coating of a mold resin surrounding said planar inductor element and said at least one ferromagnetic layer; and
a relaxation layer formed on said ferromagnetic layer, for providing strain relaxation due to contraction of said coating of a mold resin when said coating of a mold resin is hardened.
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8. The planar inductor according to claim 7, wherein said relaxation layer consists of an organic polymer film, said organic polymer film having a thermal deformation temperature which is higher than a hardening temperature of the mold resin.
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9. The planar inductor according to claim 8, wherein said organic polymer film consists of polyphenylenesulfide.
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10. The planar inductor according to claim 8, wherein the thickness of said organic polymer film is less than 20 microns.
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11. A planar inductor having an inductance, comprising:
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at least one ferromagnetic layer, each ferromagnetic layer having a saturation magnetization that is greater than 10 kG and a thickness of less than 100 microns; and
a coil stacked on said ferromagnetic layer and having a plurality of windings, the plurality of windings all extending in the same plane, wherein an effective permeability at a frequency of 10 kHz of said at least one ferromagnetic layer is not less than 1×
104.- View Dependent Claims (12, 13, 14, 15)
an insulating layer interposed between said coil and said ferromagnetic layer.
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13. The planar inductor according to claim 11, wherein said saturation magnetization is greater than 12 kilogauss.
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14. The planar inductor according to claim 11, wherein said coil comprises a plurality of stacked spiral coils, in which an insulating layer is disposed between each pair of adjacent coils.
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15. The planar inductor according to claim 11, wherein said at least one ferromagnetic layer comprises a plurality of ferromagnetic layers.
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16. A planar inductor, comprising:
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a laminated structure including a spiral conductor coil for conducting a current, said spiral conductor coil comprises a plurality of windings, the plurality of windings all extending in the same plane, wherein said spiral conductor coil is sandwiched between ferromagnetic layer, each of said ferromagnetic layers comprising a plurality of ferromagnetic ribbons which are sandwiched together; and
wherein an effective permeability at 10 kilohertz of each ferromagnetic layer is at least 1×
104.
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17. A planar inductor comprising a laminated structure including a planar inductance element comprising a plurality of windings, the plurality of windings all extending in the same plane, said planar inductance element is sandwiched between ferromagnetic layers each including a plurality of ferromagnetic ribbons, each one of said plurality of ferromagnetic ribbons having a thickness of 100 microns or less,
wherein an effective permeability at a frequency of 10 kHz of said at least one ferromagnetic layer is not less than 1×
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21. A planar inductor, comprising:
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a planar inductance element comprising a plurality of conducting coils which are stacked upon one another and separated from one another only by an insulating non-ferromagnetic layer, each of said conducting coils comprising a plurality of windings, a first plurality of windings for a first one of the plurality of conducting coils all extending in the same plane; and
at least one ferromagnetic layer stacked on said planar inductance element;
wherein said at lest one ferromagnetic layer is formed from a plurality of ferromagnetic sub-layers that are stacked upon one another and each of the plurality of ferromagnetic sub-layers has a thickness of 100 microns or less, and wherein an effective permeability at a frequency of 10 kHz of said at least one ferromagnetic layer is not less than 1×
104.- View Dependent Claims (22, 23)
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24. A planar inductor comprising a laminated structure including spiral conductor coil sandwiched between ferromagnetic layers each including a plurality of ferromagnetic ribbons, each of said ferromagnetic ribbons having a thickness of 100 microns or less,
wherein an effective permeability at a frequency of 10 kHz of said at least one ferromagnetic layer is not less than 1×
Specification