×

Structure for an optical switch on a silicon substrate

  • US 6,466,356 B1
  • Filed: 09/28/2000
  • Issued: 10/15/2002
  • Est. Priority Date: 09/28/2000
  • Status: Expired due to Term
First Claim
Patent Images

1. An actuatable mirror structure comprising:

  • a silicon substrate;

    a plurality of metal suspension arms each comprising an internal stress gradient layer, each said plurality of metal suspension arms having a first end and a second end, said first end being attached to said silicon substrate;

    a silicon area having a reflective surface layer, said silicon area being attached to said second end of said plurality of metal suspension arms; and

    a plurality of electrodes arranged on said substrate adjacent to said plurality of metal suspension arms to create an electric field for producing deflective movement of said silicon area having said reflective surface layer.

View all claims
  • 5 Assignments
Timeline View
Assignment View
    ×
    ×