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Analog pulse width modulation cell for digital micromechanical device

  • US 6,466,358 B2
  • Filed: 12/28/2000
  • Issued: 10/15/2002
  • Est. Priority Date: 12/30/1999
  • Status: Expired due to Term
First Claim
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1. A method of operating a bistable micromirror array, said micromirror array comprised of at least one cell comprised of address circuitry and a deflectable mirror element, said method comprising the steps of:

  • providing a data signal to said address circuitry in each said cell, said data signal representative of the desired integrated position of said deflectable mirror element;

    providing a ramp signal to said address circuitry in each said cell;

    generating a mirror address signal dependent on the difference between said data signal and said ramp signal, said mirror address signal having a first state when said difference exceeds a given threshold and a second state when said difference does not exceed said given threshold;

    providing a bias signal to said addressing circuitry, said bias signal operable to deflect said mirror element to a first position when said address signal is in said first state and a second position when said address signal is in said second state.

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