Bottom spin valves with continuous spacer exchange (or hard) bias

• US 6,466,418 B1
• Filed: 02/11/2000
• Issued: 10/15/2002
• Est. Priority Date: 02/11/2000
• Status: Expired due to Fees

• Current Assignee: Headway Technologies Incorporated (TDK Corporation)
• Original Assignee: Headway Technologies Incorporated (TDK Corporation)
• Inventors: Tong, Ru-Ying, Li, Min, Xiao, Rongfu, Horng, Cheng T., Torng, Chyu Jiuh, Liao, Simon H.
• Primary Examiner(s): KLIMOWICZ, WILLIAM JOSEPH
• Application Number:
  US09/502,035
• Time in Patent Office: 977 Days
• Field of Search: 360/324.12, 360/324, 360/324.1, 296/031.4, 296/031.5
• US Class Current: 360/324.12
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G11B 5/3903 using magnetic thin film layers or their effects, the films being part of integrated structures
• CPC Class Codes: H01F 10/3268 the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
• CPC Class Codes: H01F 10/3295 Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
• CPC Class Codes: H01F 41/325 applying a noble metal capping on a spin-exchange-coupled multilayer, e.g. spin filter deposition
• CPC Class Codes: Y10T 29/49044 Plural magnetic deposition layers

Abstract

A method for forming a specularly reflecting bottom spin valve magnetoresistive (SVMR) sensor element with continuous spacer exchange hard bias and a specularly reflecting bottom spin valve magnetoresistive (SVMR) sensor element fabricated according to that method. To practice the method, there is provided a substrate upon which is formed a seed layer, upon which is formed an antiferromagnetic pinning layer, upon which is formed a ferromagnetic pinned layer, upon which is formed a non-magnetic spacer layer, upon which is formed a ferromagnetic free layer, upon which is formed a specularly reflecting and capping layer. The width of the sensor element is defined by a pair of conducting leads aligned upon a pair of continuous spacer exchange hard bias layers.

Claims

1. A method for forming a specularly reflecting bottom spin valve magnetoresistive (SVMR) sensor element with continuous spacer exchange hard bias comprising:

providing a substrate;

forming over said substrate a seed layer;

forming over said seed layer an antiferromagnetic pinning layer;

forming over said antiferromagnetic pinning layer a ferromagnetic pinned layer;

forming over said ferromagnetic pinned layer a non-magnetic spacer layer;

forming over said non-magnetic spacer layer a ferromagnetic free layer;

forming over said ferromagnetic free layer a Ta layer;

oxidizing said Ta layer;

forming over said oxidized Ta layer a capping layer;

forming over said capping layer a lift-off resist pattern;

removing the developed areas of said resist pattern to expose a portion of the capping layer;

removing said exposed portion of the capping layer, together with the oxidized Ta layer and part of the ferromagnetic free layer beneath said exposed portion;

refilling the removed region with a ferromagnetic layer;

forming over said ferromagnetic layer a longitudinally biasing layer;

forming over said longitudinally biasing layer a conductor lead layer;

forming over said conductor lead layer and the remaining portion of the capping layer an upper substrate layer.

2. The method of claim 1 wherein the substrate is composed of aluminum oxide of thickness between 250 angstroms and 350 angstroms.

3. The method of claim 1 wherein the seed layer is a NiCr layer of thickness between 45 angstroms and 65 angstroms.

4. The method of claim 1 wherein the antiferromagnetic pinning layer is a layer of MnPt of thickness between 150 angstroms and 250 angstroms.

5. The method of claim 1 wherein the ferromagnetic pinned layer is a layer of CoFe of thickness between 15 angstroms and 25 angstroms.

6. The method of claim 1 wherein the non-magnetic spacer layer is a layer of Cu of thickness between 18 angstroms and 25 angstroms.

7. The method of claim 1 wherein the ferromagnetic free layer is a double layer consisting of a layer of CoFe of thickness less than 5 angstroms on which is formed a layer of NiFe of thickness between 30 angstroms and 60 angstroms.

8. The method of claim 1 wherein the Ta layer is of thickness less than 5 angstroms.

9. The method of claim 1 wherein the layer of Ta is oxidized by a process of plasma ashing to form, thereby, a layer of TaO.

10. The method of claim 9 wherein the plasma ashing is carried out in a substrate cleaning module.

11. The method of claim 1 wherein the capping layer is a layer of NiCr of thickness between 10 angstroms and 30 angstroms.

12. The method of claim 1 wherein the exposed region of the capping layer is IBE or sputter-etched to completely remove said exposed region and to completely remove a corresponding region of the oxidized Ta layer beneath said exposed region of the capping layer and to partially remove a corresponding region of the ferromagnetic free layer beneath the removed region of said oxidized Ta layer.

13. The method of claim 1 wherein the ferromagnetic layer that refills the etched-out region is a layer of NiFe.

14. The method of claim 1 wherein the longitudinally biasing layer that is formed over the ferromagnetic layer is a layer of the antiferromagnetic material MnNi.

15. The method of claim 1 wherein the longitudinally biasing layer that is formed over the ferromagnetic layer is a layer of the antiferromagnetic material MnPt.

16. The method of claim 1 wherein the longitudinally biasing layer that is formed over the ferromagnetic layer is a layer of the antiferromagnetic material IrMn.

17. The method of claim 1 wherein the longitudinally biasing layer that is formed over the ferromagnetic layer is a layer of the hard magnetic material CoPt.

18. The method of claim 1 wherein the longitudinally biasing layer that is formed over the ferromagnetic layer is a layer of the hard magnetic material CoPtCr.

19. The method of claim 1 wherein the conductor lead layer is a layer of Ta (50-100 angstroms)/Au (400-500 angstroms)/Ta (50-100 angstroms) which is aligned and deposited on the longitudinally biasing layer.

20. The method of claim 1 wherein the upper substrate layer is layer of aluminum oxide deposited to a thickness of between 350 angstroms and 500 angstroms.

21. A bottom valve, specularly reflecting spin valve magnetoresistive (SVMR) sensor element with continuous spacer exchange hard bias comprising:

a substrate;

a seed layer formed over said substrate;

an antiferromagnetic pinning layer formed over said seed layer;

a ferromagnetic pinned layer formed over said antiferromagnetic pinning layer;

a non-magnetic spacer layer formed over said ferromagnetic pinned layer;

a ferromagnetic free layer formed over said non-magnetic spacer layer;

a layer of TaO formed over said ferromagnetic free layer;

a capping layer formed over said TaO layer;

an etched out region that is refilled with a ferromagnetic layer;

a longitudinally biasing layer that is formed over said ferromagnetic layer;

a conductor lead layer that is formed over said longitudinally biasing layer;

an upper substrate layer that is formed over the conductor lead layer and the remaining portion of said capping layer.

22. The structure of claim 21 wherein the substrate is composed of aluminum oxide of thickness between 250 angstroms and 350 angstroms.

23. The structure of claim 21 wherein the seed layer is a NiCr seed layer of thickness between 45 angstroms and 65 angstroms.

24. The structure of claim 21 wherein the antiferromagnetic pinning layer is a layer of MnPt of thickness between 150 angstroms and 250 angstroms.

25. The structure of claim 21 wherein the ferromagnetic pinned layer is a layer of CoFe of thickness between 15 angstroms and 25 angstroms.

26. The structure of claim 21 wherein the non-magnetic spacer layer is a layer of Cu of thickness between 18 angstroms and 25 angstroms.

27. The structure of claim 21 wherein the ferromagnetic free layer is a layer consisting of a layer of CoFe of thickness less than 5 angstroms on which is formed a layer of NiFe of thickness between 30 angstroms and 60 angstroms.

28. The structure of claim 21 wherein the layer of TaO is of thickness less than 10 angstroms.

29. The structure of claim 21 wherein the capping layer is a layer of NiCr of thickness between 10 angstroms and 30 angstroms.

30. The structure of claim 21 wherein the layer that refills the etched-out region is a layer of the ferromagnetic material NiFe.

31. The structure of claim 21 wherein the longitudinally biasing layer is a layer of the antiferromagnetic material MnNi.

32. The structure of claim 21 wherein the longitudinally biasing layer is a layer of the antiferromagnetic material MnPt.

33. The structure of claim 21 wherein the longitudinally biasing layer is a layer of the antiferromagnetic material IrMn.

34. The structure of claim 21 wherein the longitudinally biasing layer is a layer of the hard magnetic material CoPt.

35. The structure of claim 21 wherein the longitudinally biasing layer is a layer of the hard magnetic material CoPtCr.

36. The structure of claim 21 wherein the conductor lead layer is a layer of Ta (50-100 angstroms)/Au (400-500 angstroms)/Ta (50-100 angstroms) which is aligned and deposited on the longitudinally biasing layer.

37. The structure of claim 21 wherein the upper substrate layer is a layer of aluminum oxide deposited to a thickness of between 350 angstroms and 500 angstroms.