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Method and apparatus for beam tool center point calibration

  • US 6,467,178 B1
  • Filed: 09/11/2000
  • Issued: 10/22/2002
  • Est. Priority Date: 09/11/2000
  • Status: Expired due to Fees
First Claim
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1. A method for determining a tool center point for a beam tool, the method comprising the steps of:

  • oscillating the tool across an aperture assembly such that light from the tool periodically passes through the aperture assembly;

    determining center point coordinate information based on passage of the light through the aperture assembly; and

    calculating the tool center point based on the center point coordinate information.

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