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Method and apparatus for preventing degradation of electrostatically actuated devices

  • US 6,467,879 B1
  • Filed: 10/16/2000
  • Issued: 10/22/2002
  • Est. Priority Date: 10/16/2000
  • Status: Expired due to Term
First Claim
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1. An electrostatic device, comprising:

  • a substrate having an insulating layer thereon;

    a conductor formed on said insulating layer;

    a membrane adjacent to said conductor; and

    an actuator chamber formed between said membrane and said conductor, said membrane flexing toward said conductor when a voltage bias is applied thereto, said membrane having (i) a membrane top;

    (ii) membrane sides for supporting said membrane above said conductor and said insulating layer;

    (iii) an inner protrusion structure, located on said membrane top, for preventing said membrane top from touching said conductor; and

    (iv) an outer protrusion structure, surrounding said inner protrusion structure, on said membrane top for reducing excessive flexing of said membrane top.

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