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Fluorine-doped diamond-like coatings

  • US 6,468,642 B1
  • Filed: 12/02/1998
  • Issued: 10/22/2002
  • Est. Priority Date: 10/03/1995
  • Status: Expired due to Term
First Claim
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1. An article comprising a substrate coated with a fluorine-doped coating, wherein said coating comprises a diamond-like composition comprised of carbon, silicon, oxygen, hydrogen, and fluorine and wherein the coating has a hardness of from about 5 to about 32 GPa and a surface energy of from about 19 to about 29 dyne/cm.

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