Near field optical microscope and probe for near field optical microscope

• US 6,469,288 B1
• Filed: 05/15/2000
• Issued: 10/22/2002
• Est. Priority Date: 05/17/1999
• Status: Expired due to Fees

• Current Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Original Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Inventors: Sasaki, Yasuo, Sasaki, Hiroko
• Primary Examiner(s): LE, QUE TAN
• Application Number:
  US09/571,442
• Time in Patent Office: 890 Days
• Field of Search: 250/201.3, 250/306, 250/307, 250/216, 385/32, 385/8, 385/43
• US Class Current: 250/201.3
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: Y10S 977/862 Near-field probe

Abstract

A near-field optical microscope comprises an illumination part, a probe, a light detection part, and a scanning part. The illumination part illuminates a sample surface with light. The probe is provided at a position near the sample surface illuminated with the light. The light detection part detects light scattered by the probe. The scanning part scans the sample and a top end of the probe relatively to each, other. The top end of the probe is a top end of an extending part extending in one direction from a body of the probe. In the side of the top end of the extending part, the extending part is at most three times or less as thick as a top end diameter, over a length of a wavelength of the illuminating light. The near-field optical microscope further comprises means for vibrating the probe in a lengthwise direction of the extending part.

Claims

1. A near-field optical microscope comprising:

a light illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the

top end of the probe relatively to each other, wherein a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range illuminated with the light from the light illumination part is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from a top end of the probe to a distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end to the distance z₀, and

2. A near-field optical microscope comprising:

a light illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection part is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from a top end of the probe to a distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end to the distance z₀, and

3. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a range illuminated with the light from the extending part is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the extending part is d_max within a range from a top end of the extending part to a distance z₀, and the top end diameter of the extending part is d₀, the diameter of the extending part monotonously increases from the top end to the distance z₀, and

4. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a sensitivity range of a light detector of the probe is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from a top end of the probe to a distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end to the distance z₀, and

 

d_max≦

d₀(z+λ

/2)/(λ

/2)

is given.

5. A near-field optical microscope comprising:

an illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range illuminated with the light from the illumination part is z₀, the wavelength of the illuminating light is λ

, and the top end diameter of the probe is d₀, a diameter d of the probe at a distance from the top end, z, monotonously increases from the top end to the distance z₀, and

6. A near-field optical microscope comprising:

an illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection part of the probe is z₀, the wavelength of the illuminating light is λ

, and the top end diameter of the probe is d₀, a diameter d of the probe at a distance from the top end, Z, monotonously increases from the top end to the distance z₀, and

7. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a range illuminated with the light of the probe is z₀, the wavelength of the illuminating light is λ

, a diameter of the probe within a range from a top end of the extending part to a distance z₀ is d, and the top end diameter of the extending part is d₀, the diameter d of the probe at a distance from the top end, Z, monotonously increases from the top end to the distance z₀, and

8. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a sensitivity range of a light detector of the probe is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the extending part within a range from a top end of the extending part to a distance z₀ is d_max, and the top end diameter of the extending part is d₀, the diameter d of the probe at a distance from the top end, Z, monotonously increases from the top end to the distance z₀, and

9. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein a top end diameter d₀ of the extending part is 125 nm or less, and

a diameter d of the probe monotonously increases within a range from the top end to a distance z₀=1.5 μ

m and a maximum value d_max of the diameter of the extending part satisfies

10. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter d₀ of the extending part is 125 nm or less, and

a diameter d of the probe monotonously increases within a range from the top end to a distance z₀=1.5 λ

m and the diameter d of the extending part at a distance from the top end, Z, satisfies

19. A probe for near-field optical microscope, according to one of claims 10, 13, 14, 17, and 18, wherein the extending part is made of a carbon deposit.

20. A probe for a near-field optical microscope, according to one of claims 3, 4, 7 to 10, 13, 14, 17, and 18, wherein the extending part is made of metal.

21. A probe for a near-field optical microscope, according to one of claims 3, 4, 7 to 10, 13, 14, 17, and 18, wherein the extending part is made of two kinds of materials respectively having different scattering efficiencies and has a structure in which a material having a high scattering efficiency sticks to and around a material having a low scattering efficiency.

11. A near-field optical microscope comprising:

an illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range illuminated with the light from the illumination part of the probe is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from the top end of the probe to the distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end of the distance z₀, and

12. A near-field optical microscope comprising:

an illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the prove is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection part of the probe is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from the top end of the probe to the distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end to the distance z₀, and

13. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter d₀ of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a range illuminated with the light from the probe is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the extending part is d_max within a range from a top end of the extending part to the distance z₀, and the top end diameter of the probe is d₀, the diameter of the extending part monotonously increases from the top end to the distance z₀, and

14. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter d₀ of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a sensitivity range of a light detector of the extending part is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the extending part is d_max within a range from a top end of the extending part to the distance z₀, and the top end diameter of the probe is d₀, the diameter of the extending part monotonously increases from the top end to the distance z₀, and

15. A near-field optical microscope comprising:

an illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range illuminated with the light from the illumination part of the probe is z₀, the wavelength of the illuminating light is λ

, the top end diameter of the probe is d₀, and the diameter d of the probe at a distance from the top end of the probe, Z, monotonously increases from the top end of the probe to the distance z₀, and

16. A near-field optical microscope comprising:

an illumination part for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with light;

a light detection part for detecting scattered light scattered by the probe; and

a scanning part for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the prove is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection part of the probe is z₀, the wavelength of the illuminating light is λ

, the top end diameter of the probe is d₀, and the diameter d of the probe at a distance from the top end of the probe, Z, monotonously increases from the top end of the probe to the distance z₀, and

17. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a range illuminated with the light from the extending part is z₀, the wavelength of the illuminating light is λ

, a diameter of the extending part is d within a range from a top end of the extending part to the distance z₀, the top end diameter of the extending part is d₀, and the diameter d of the extending part at a distance from the top end of the probe, Z, monotonously increases from the top end to the distance z₀, and

18. A probe used for a near-field optical microscope, comprising:

a probe body; and

an extending part extending in one direction from the probe body, wherein

a top end diameter of the extending part is equal to or smaller than ¼

of a wavelength of light illuminating the probe, and

where a length of a sensitivity range of a light detector of the extending part is z₀, the wavelength of the illuminating light is λ

, a diameter of the extending part is d within a range from a top end of the extending part to the distance z₀, the top end diameter of the extending part is d₀, and the diameter d of the extending part at a distance from the top end of the probe, Z, monotonously increases from the top end to the distance z₀, and

22. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range illuminated with the light from the light illumination means is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from a top end of the probe to a distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end to the distance z₀, and

23. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection means is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from a top end of the probe to a distance z₀, and the top end diameter of the probe is d₀, the diameter of the probe monotonously increases from the top end to the distance z₀, and

24. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range illuminated with the light from the illumination means is z₀, the wavelength of the illuminating light is λ

, and the top end diameter of the probe is d₀, a diameter d of the probe at a distance from the top end, Z, monotonously increases from the top end to the distance z₀, and

25. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection means of the probe is z₀, the wavelength of the illuminating light is λ

, and the top end diameter of the probe is d₀, a diameter d of the probe at a distance from the top end, Z, monotonously increases from the top end to the distance z₀, and

26. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range of the probe which is illuminated with the light from the illumination means is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from the top end of the probe to the distance z₀, and the top end diameter of the probe is d₀, a diameter of the probe monotonously increases from the top end to the distance z₀, and

27. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection means of the probe is z₀, the wavelength of the illuminating light is λ

, a maximum value of a diameter of the probe is d_max within a range from the top end of the probe to the distance z₀, and the top end diameter of the probe is d₀, a diameter of the probe monotonously increases from the top end to the distance z₀, and

28. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a range of the probe which is illuminated with the light from the illumination means is z₀, the wavelength of the illuminating light is λ

, the top end diameter of the probe is d₀, and a diameter d of the probe at a distance from the top end of the probe, z, monotonously increases from the top end of the probe to the distance z₀, and

29. A near-field optical microscope comprising:

light illumination means for illuminating a sample surface of a sample with light;

a probe having a top end provided at a position near the sample surface which is illuminated with the light;

light detection means for detecting scattered light scattered by the probe; and

scanning means for scanning the sample and the top end of the probe relatively to each other, wherein

a top end diameter of the probe is equal to or smaller than ¼

of a wavelength of the light illuminating the probe, and

where a length of a detection range of the light detection means of the probe is z₀, the wavelength of the illuminating light is λ

, the top end diameter of the probe is d₀, and a diameter d of the probe at a distance from the top end of the probe, z, monotonously increases from the top end of the probe to the distance z₀, and