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Semiconductor yield management system and method

DC
  • US 6,470,229 B1
  • Filed: 12/08/1999
  • Issued: 10/22/2002
  • Est. Priority Date: 12/08/1999
  • Status: Expired
First Claim
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1. A yield management system, comprising:

  • means for pre-processing an input data set comprising one or more prediction variables and one or more response variables containing data about a particular semiconductor process, the pre-processing means further comprising means for removing prediction variables having more than a predetermined number of missing values, means for removing prediction variables having more than a predetermined number of classes, and means for removing data having more than a predetermined number of missing values to generate pre-processed data;

    means for generating a model based on the pre-processed data, the model being a decision tree;

    means for modifying the model based on user input; and

    means for analyzing the model using a statistical tool to generate one or more key yield factors based on the input data set.

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