×

Nozzle arrangement that incorporates a reversible actuating mechanism

  • US 6,471,336 B2
  • Filed: 05/25/2001
  • Issued: 10/29/2002
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
Patent Images

1. A nozzle arrangement that is the product of an integrated circuit fabrication technique, the nozzle arrangement comprising:

  • a substrate;

    an actuating mechanism that is mounted on the substrate and that comprises a working member that is movable reciprocally along a path of travel in order to perform work; and

    at least two actuators that are arranged with respect to the working member to act on the working member, the actuators being configured so that the working member is under the influence of at least one of the actuators at substantially all points along the path of travel.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×