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Substrate transfer shuttle having a magnetic drive

  • US 6,471,459 B2
  • Filed: 11/23/1999
  • Issued: 10/29/2002
  • Est. Priority Date: 05/20/1998
  • Status: Expired due to Term
First Claim
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1. An apparatus for performing a thin film fabrication process on a substrate, comprising:

  • a processing chamber;

    a load lock chamber in communication with the processing chamber;

    a valve disposed between the processing chamber and the load lock chamber;

    a substrate support movable along a path between the processing chamber and the load lock chamber, wherein the substrate support is disposable within the load lock chamber while the valve is closed and processing occurs in the processing chamber; and

    a magnetic drive including a first magnetic surface on the movable substrate support to generate a first magnetic field and a plurality of movable second magnetic surfaces disposed outside and in a fixed position relative to the processing chamber and the load lock chamber to generate. a plurality of second magnetic fields, the first magnetic field magnetically engageable with the plurality of second magnetic fields so that movement of the plurality of second magnetic fields causes the substrate support to move along the path, wherein the plurality of movable second magnetic surfaces rotate about one or more shafts positioned orthogonal to the path and fixed relative thereto.

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