Dual damascene interconnect structures that include radio frequency capacitors and inductors

• US 6,472,721 B2
• Filed: 09/27/2001
• Issued: 10/29/2002
• Est. Priority Date: 07/24/2000
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Thei, Kong-Beng, Ho, Yen-Shih, Yeh, Ta-Hsun, Hsu, Heng-Ming, Peng, Kuo-Reay, Ma, Ssu-Pin, Chou, Chi-Wu, Chen, Chun-Hon
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): Smoot, Stephen W.
• Application Number:
  US09/963,749
• Publication Number:
  US 20020019123A1
• Time in Patent Office: 397 Days
• Field of Search: 257/531, 257/532, 257/751, 257/762, 257/773, 257/760
• US Class Current: 257/531
• CPC Class Codes: H01L 21/3212 by chemical mechanical polishing [CMP]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: H01L 28/56 the dielectric comprising two or more layers, e.g. comprising buffer layers, seed layers, gradient layers
• CPC Class Codes: H01L 28/60 Electrodes
• CPC Class Codes: H01L 28/90 having vertical extensions

Abstract

In many mixed-signal or radio frequency Rf applications, inductors and capacitors are needed at the same time. For a high performance inductor devices, a thick metal layer is needed to increase performance, usually requiring an extra masking process. The present invention describes both a structure and method of fabricating both copper metal-insulator-metal (MIM) capacitors and thick metal inductors, simultaneously, with only one mask, for high frequency mixed-signal or Rf, CMOS applications, in a damascene and dual damascene trench/via process. High performance device structures formed by this invention include: parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, metal-insulator-metal (MIM) capacitors, thick inductor metal wiring, interconnects and contact vias.

Claims

1. A parallel plate capacitor and thick metal inductor structure comprising:

(a) a semiconductor substrate or IC module, having a layer of dielectric;

(b) an underlying metal diffusion barrier layer and overlying a first level conductor wiring metal formed in said dielectric layer;

(c) a metal protect buffer layer formed over said first level conductor wiring layer;

(d) an intermetal dielectric (IMD) layer formed over said metal protect buffer layer;

(e) a plurality of metal-insulator-metal MIM/Inductor damascene area openings selectively formed in beth said intermetal dielectric (IMD) layer and in said metal protect buffer layer;

(f) a passivating insulating protect buffer layer formed over said intermetal dielectric and over exposed first level conductor wiring;

(g) an MIM insulating layer formed over said insulating protect buffer layer;

(h) a conductive metal protect buffer layer formed over said MIM insulating layer;

(i) dual damascene via/trench openings selectively formed in said intermetal dielectric (IMD) layer;

(j) conducting inlaid thick metal for high performance formed in all openings to form dual damascene trench interconnects, contact vias, and metal-insulator-metal (MIM) capacitor top metal (CTM) electrodes/inductor thick metal line structures.

2. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein high performance metal-insulator-metal (MIM) capacitor inductor devices are formed simultaneously and with dual damascene trench interconnects and contact vias.

3. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein high performance metal-insulator-metal (MIM) capacitor and inductor devices are formed simultaneously for mixed signal and high frequency Rf CMOS circuits, logic and memory device and circuit applications.

4. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said substraate is semiconductor single crystal silicon or an IC module.

5. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said via/trench openings contain a barrier selected from the group consisting of Ta, TaN and Ta/TaN in a thickness range from about 100 to 4,000 Angstroms.

6. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said conductor or conducting material consists of the following:

parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, Inductor metal wiring, interconnects and contact vias, selected from the group consisting of Cu, AlCu alloys, AlCuSi alloys, and W.

7. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said conducting inlaid thick metal comprises a copper seed layer liner, for parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, Inductor metal wiring, interconnects and contact vias, seed type materials comprised of thin Cu, thickness from 4,000 to 4,000 Angstroms.

8. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said damascene inlaid conducting material layers forming conducting interconnect lines and contact vias for parallel plate capacitor bottom metal (CBM) electrodes and capacitor top metal (CTM) electrodes, Inductor metal wiring, interconnects and contact vias, comprises copper, upon a copper seed layer, Cu thickness from 1,000 to 10,000 Angstroms.

9. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said dielectric layer, intermetal dielectric layer (IMD), and MIM insulating layer are composed of silicon dioxide or silicon oxide, and/or silicon nitride.

10. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said insulating protect buffer layer is silicon nitride.

11. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said insulating protect buffer layer can be combined with said MIM insulating layer to form just one layer and the material used is silicon nitride.

12. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said contact via and/or trench interconnect is formed simultaneously for the parallel plate capacitor metal-insulator-metal MIM/Inductor area structure, to combine inductor and lower metal layer structures, capacitor bottom metal (CBM) and capacitor top metal (CTM) with thick metal inductor lines.

13. The parallel plate capacitor and thick metal inductor structure of claim 1, wherein said conducting metal interconnects, contact vias and metal-insulator-metal (MIM)/Inductors structures can form multilevel structures by repeating the formation of the said structures described herein, by repeating steps (c) through (j).