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Touch panel substrate having transparent conductive film

  • US 6,473,235 B2
  • Filed: 02/15/2001
  • Issued: 10/29/2002
  • Est. Priority Date: 02/18/2000
  • Status: Expired due to Term
First Claim
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1. A transparent touch panel substrate comprising a transparent substrate and deposited thereon a transparent conductive metal oxide film which contains zinc, indium, and tin as metallic elements and is soluble in acids, wherein the transparent conductive metal oxide film contains zinc in an amount of from 40 to 65 atomic % based on all metals and contains indium in an amount of from 0.25 to 1.3 times the amount of tin on an atomic basis.

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