AC waveforms biasing for bead manipulating chucks
First Claim
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1. A method for adhering charged grains to a bead collection zone on a bead contact surface comprising:
- (1) adhering a substrate to an electrostatic chuck, with the substrate arrayed over a grain-attracting electrode of the electrostatic chuck so that a surface of the substrate defines the bead contact surface;
(2) applying an AC waveform potential to the grain-attracting electrode to create a grain attracting field, wherein the AC waveform potential comprises a grain-attracting potential pulse followed by a recovery period adapted to allow an effective grain attraction potential at the bead collection zone on activation of a subsequent grain-attracting potential pulse; and
(3) attracting and retaining grains to the bead collection zone.
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Abstract
AC waveforms biasing of bead transporter chucks and their accumulated charge sensing circuits tailored for low resistivity substrates and beads where if traditional DC quasi-static biasing potentials were used, the bead attraction potentials of the chuck would undergo rapid RC decay and cause the bead transporter chuck to stop working. Methods for selecting AC waveforms are given, including those that maximize the time average of the bead attraction potential at the bead collection zone of the bead contact surface.
66 Citations
20 Claims
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1. A method for adhering charged grains to a bead collection zone on a bead contact surface comprising:
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(1) adhering a substrate to an electrostatic chuck, with the substrate arrayed over a grain-attracting electrode of the electrostatic chuck so that a surface of the substrate defines the bead contact surface;
(2) applying an AC waveform potential to the grain-attracting electrode to create a grain attracting field, wherein the AC waveform potential comprises a grain-attracting potential pulse followed by a recovery period adapted to allow an effective grain attraction potential at the bead collection zone on activation of a subsequent grain-attracting potential pulse; and
(3) attracting and retaining grains to the bead collection zone. - View Dependent Claims (2, 3, 4, 5, 6, 7)
(4) applying a bias to the electrostatic chuck to create a force favoring release of the attracted grains, and releasing the grains onto another surface or surfaces.
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7. The method of claim 6, wherein the other surfaces are found on a microtiter plate.
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8. A method for adhering charged grains to a bead collection zone on a bead contact surface comprising:
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(1) adhering a substrate with a resistivity below 10 11 Ω
-cm to an electrostatic chuck, with the substrate arrayed over a grain-attracting electrode of the electrostatic chuck so that a surface of the substrate defines the bead contact surface;
(2) applying an AC waveform potential to the grain-attracting electrode to create a grain attracting field, wherein the AC waveform potential comprises a grain-attracting potential at the bead collection zone on activation of a subsequent grain-attracting potential pulse, wherein the AC waveform potential corresponds to applied voltages and time periods effective so that the voltage at the bead collection zone resulting from the grain-attracting potentials following a grain-attracting potential is at least 10% of an initial voltage at the bead collection zone, or the AC waveform potential corresponds to applied voltages and time periods effective so that the integrated voltage at the bead collection zone integrated over the pulse period during which a grain-attracting voltage is applied voltage at the bead collection zone is at leat 20% of an initial integrated voltage; and
(3) attracting and retaining a grain to the bead collection zone. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
(4) providing an accumulated charge sensing circuit for the bead transporter chuck having a charge sensing electrode for monitoring accumulated charge on a bead collection zone of the bead contact surface, comprising (a) an AC bias source, (b) a sensing capacitor electrically connected between the charge collector electrode and the AC bias source, and (c) an electrometer electrically connected between the AC bias source and coupling capacitor to measure the potential the sensing capacitor;
(5) terminating the application of the AC waveform potential when the charge sensing circuit indicates that sufficient grains have been accumulated at the bed collection zone, or, where there are multiple bead collection zones and two or more charge sensing circuits, adjusting AC waveform potentials so that grain accumulation at various bead collection zones is adjusted.
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10. The method of claim 8, wherein grains are attracted to apply at least 300 μ
- g/4 mm of grains to bead collection zone.
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11. The method of claim 8, wherein the AC waveform potential is configured such that the grain attraction potential at the bead collection zone is greater, on average, than the obtained with a time-averaged DC potential corresponding to the AC waveform potential.
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12. The method of claim 8, comprising fabricating dosage forms by:
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providing an edible substrate as the substrate; and
operating the electrostatic chuck pursuant to steps (1) through (3) to deposit measured amounts of powder, comprising a pharmaceutically active substance, on spatially resolved regions of the edible substrate.
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13. The method of claim 8, wherein the recovery period is at least 1.0 times substrate resistivity (in Ω
- -cm) times 10−
9 mS.
- -cm) times 10−
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14. The method of claim 8, wherein the recovery period is at least 1.25 times substrate resistivity (in Ω
- -cm) times 10 −
9 mS.
- -cm) times 10 −
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15. The method of claim 8, further comprising:
(6) applying a bias to the electrostatic chuck to create a force favoring release of the attracted grains, and releasing the grains onto another substrate.
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16. The method of claim 15, wherein the other surfaces are found on a microtiter plate.
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17. An electrostatic chuck for attracting charged grains to a bead collection zone on a bead contact surface comprising:
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a bead electrode for selectivity establishing a grain attracting field to the bead collection zone, the bead electrode shaped and configured in such a manner so that when an AC waveform potential is applied thereto, the grains are influenced by it and guided to selective retention by the bead electrode to the bead collection zone; and
an electronic driver programmed to deliver the AC waveform potential configured to provide a repeated effective grain attraction potential at the bead collection zone, wherein the AC waveform potential comprises a grain-attracting potential pulse followed by a recovery period wherein (a) the AC waveform potential corresponds to applied voltages and time periods effective so that the voltage at the bead collection zone resulting from the grain-attracting potentials following a grain-attracting potential (other than an initial grain-attracting potential) is at least 10% of an initial voltage at the bead collection zone, or (c) the AC waveform potential corresponds to applied voltages and time periods effective so that the integrated voltage at the bead collection zone integrated over the pulse period (other than an initial pulse period) during which a grain-attracting voltage is applied voltage at the bead collection zone is at least 20% of an initial integrated voltage. - View Dependent Claims (18, 19, 20)
(a) the AC waveform potential corresponds to applied voltages and time periods effective so that the voltage at the bead collection zone resulting from the grain-attracting potentials following a grain-attracting potential (other than an initial grain-attracting potential) is at least 10% of an initial voltage at the bead collection zone. -
20. The electrostatic chuck of claim 17, wherein
(b) the AC waveform potential corresponds to applied voltages and time periods effective so that the integrated voltage at the bead collection zone integrated over the pulse period (other than an initial pulse period) during which a grain-attracting voltage is applied voltage at the bead collection zone is at least 20% of an initial integrated voltage.
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Specification