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AC waveforms biasing for bead manipulating chucks

  • US 6,475,351 B2
  • Filed: 01/30/2001
  • Issued: 11/05/2002
  • Est. Priority Date: 06/10/1998
  • Status: Expired due to Fees
First Claim
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1. A method for adhering charged grains to a bead collection zone on a bead contact surface comprising:

  • (1) adhering a substrate to an electrostatic chuck, with the substrate arrayed over a grain-attracting electrode of the electrostatic chuck so that a surface of the substrate defines the bead contact surface;

    (2) applying an AC waveform potential to the grain-attracting electrode to create a grain attracting field, wherein the AC waveform potential comprises a grain-attracting potential pulse followed by a recovery period adapted to allow an effective grain attraction potential at the bead collection zone on activation of a subsequent grain-attracting potential pulse; and

    (3) attracting and retaining grains to the bead collection zone.

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