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Diluent assisted lubrication of micromechanical devices

  • US 6,475,570 B2
  • Filed: 12/31/2001
  • Issued: 11/05/2002
  • Est. Priority Date: 12/29/2000
  • Status: Active Grant
First Claim
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1. A method of coating the surfaces of a micromechanical device, the method comprising:

  • mixing a coating material with a carrier fluid;

    nebulizing said mixture to form an aerosol of droplets of said mixture;

    evaporating a majority of said carrier fluid from said aerosol;

    exposing said micromechanical device to said evaporated aerosol; and

    depositing said evaporated droplets of coating material on said micromechanical device.

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