Extreme repetition rate gas discharge laser with improved blower motor

• US 6,477,193 B2
• Filed: 12/22/2000
• Issued: 11/05/2002
• Est. Priority Date: 07/18/1998
• Status: Expired due to Fees

• Current Assignee: Cymer Incorporated (ASML Holding NV)
• Original Assignee: Cymer Incorporated (ASML Holding NV)
• Inventors: Partlo, William N., Oliver, I. Roger
• Primary Examiner(s): Scott, Jr., Leon
• Application Number:
  US09/748,316
• Publication Number:
  US 20020044587A1
• Time in Patent Office: 683 Days
• Field of Search: 372/55, 372/57, 372/38, 372/34, 372/37, 372/98, 307/106
• US Class Current: 372/58
• CPC Class Codes: G03F 7/70025 by lasers
• CPC Class Codes: G03F 7/70041 by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
• CPC Class Codes: G03F 7/70333 Focus drilling, i.e. increase in depth of focus for exposure by modulating focus during exposure [FLEX]
• CPC Class Codes: G03F 7/70483 Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
• CPC Class Codes: G03F 7/70575 Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
• CPC Class Codes: G03F 7/70933 Purge, e.g. exchanging fluid or gas to remove pollutants
• CPC Class Codes: H01S 3/036 Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube H01S3/031 takes precedence
• CPC Class Codes: H01S 3/038 Electrodes, e.g. special shape, configuration or composition
• CPC Class Codes: H01S 3/0385 Shape
• CPC Class Codes: H01S 3/0404 Air- or gas cooling, e.g. by dry nitrogen
• CPC Class Codes: H01S 3/041 for gas lasers H01S3/0401 takes precedence
• CPC Class Codes: H01S 3/097 by gas discharge of a gas laser
• CPC Class Codes: H01S 3/09702 Details of the driver electronics and electric discharge circuits
• CPC Class Codes: H01S 3/0971 transversely excited H01S3/0975 takes precedence
• CPC Class Codes: H01S 3/0975 using inductive or capacitive excitation
• CPC Class Codes: H01S 3/104 in gas lasers
• CPC Class Codes: H01S 3/105 by controlling the mutual position or the reflecting properties of the reflectors of the cavity , e.g. by controlling the cavity lengthH01S3/10076, H01S3/13 take precedence
• CPC Class Codes: H01S 3/1055 one of the reflectors being constituted by a diffraction grating
• CPC Class Codes: H01S 3/134 in gas lasers
• CPC Class Codes: H01S 3/22 Gases
• CPC Class Codes: H01S 3/2207 : Noble gas ions, e.g. Ar+>, Kr+>
• CPC Class Codes: H01S 3/225 : comprising an excimer or exciplex
• CPC Class Codes: H03K 17/80 : using non-linear magnetic devices; using non-linear dielectric devices H03K17/95, H03K17/97 take precedence
• CPC Class Codes: H03K 3/57 : the switching device being a semiconductor device

Abstract

A gas discharge laser capable of operating at pulse rates in the range of 4,000 Hz to 6,000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. Important improvements over prior art designs include: (1) a squirrel cage type fan for producing gas velocities through the discharge region of more than 67 m/s and capable of continuous trouble-free operation for several months, (2) a liquid cooled drive motor having a low loss sealing member separating the motor rotor from the motor starter and protecting the motor from the laser gas and a breach detection device for detecting any breach of the sealing member, (3) a heat exchanger system capable of removing in excess of 16 kw of heat energy from the laser gas and (4) a pulse power system capable of providing precisely controlled electrical pulses to the electrodes needed to produce laser pulses at the desired pulse energies in the range of 5 mJ to 10 mJ or greater at pulse repetition rates in the range of 4,000 Hz to 6,000 Hz or greater.

Claims

1. An extreme repetition rate gas discharge laser capable of operating at pulse repetition rates in the range of 4,000 to 6,000 pulses per second, said laser comprising:

A) a laser chamber having two elongated electrodes, defining a discharge region and containing laser gas,

B) a squirrel cage type tangential fan for circulating said laser gas producing sufficient gas velocities in said discharge region to clear from said discharge region, following each pulse, substantially all discharge produced ions prior to a next pulse when operating at a repetition rate in the range of 4,000 pulses per second or greater,

C) a finned heat exchanger system capable of removing at least 16 kw of heat energy from said laser gas,

D) a pulse power system configured to provide electrical pulses to said electrodes sufficient to produce laser pulses at rates of at least 4,000 pulses per second with precisely controlled pulse energies in the range of about 5 mJ to 10 mJ, and

E) a laser beam measurement and control system capable of measuring pulse energy energy wavelength and bandwidth of substantially every pulse with feedback control of pulse energy and wavelength, and

F) a liquid cooled motor, defining a rotor and a stator, driving said tangential fan, said motor comprising;

     1) a pressure cup sealing member separating said stator from said rotor and protecting said stator from said laser gas and

     2) a breach detection means for detecting a breach of said sealing member.

2. A laser as in claim 1 wherein said liquid cooled motor is a water cooled motor.

3. A laser as in claim 2 wherein said pressure cup sealing member is comprised of a metal no thicker than about 0.005 inch.

4. A laser as in claim 2 wherein said pressure cup is comprised of a non-conductive material.

5. A laser as in claim 4 wherein said bearings are comprised of a roller bearing and a ball bearing.

6. A laser as in claim 4 wherein said ceramic bearings are two ball bearings defining a drive bearing and an idle bearing.

7. A laser as in claim 2 wherin said pressure cup is comprised of a ceramic material.

8. A laser as in claim 7 wherein said ceramic material is aluminium oxide.

9. A laser as in claim 7 wherein preload applied to said ball bearing by a drive motor having a stator and a rotor with its rotor defining an axial magnetic center, said center being slightly off center of a magnetic field produced by the stator.

10. A laser as in claim 2 wherein said water cooled motor comprises a helical coil water path surrounding said stater.

11. A laser as in claim 2 and wherein said chamber also comprises a vane structure upstream of said discharge region for normalizing gas velocity upstream of said discharge region.

12. A laser as in claim 1 wherein said detection means is a pressure detector.

13. A laser as in claim 12 wherein said pressure detector is configured to de-energize said motor in the event of a rupture of said pressure cup.

14. A laser as in claim 13 wherein said magnetic force is produced by a drive motor.

15. A laser as in claim 12 wherein preload is applied to both of said bearings with a spring and additional preload is applied to said drive bearing by a magnetic force.

16. A laser as in claim 1 wherein said finned heat exchanger system is water cooled.

17. A laser as in claim 16 wherein said heat exchanger system comprises at least four separate water cooled heat exchangers.

18. A laser as in claim 17 wherein each of said four heat exchangers comprise a tubular water flow passage containing a turbulator.

19. A laser as in claim 16 wherein heat exchanger system comprises at least one heat exchanger having a tubular water flow passage wherein at least one turbulator is located in said path.

20. A laser as in claim 1 wherein said pulse power power system comprise water cooled electrical components.

21. A laser as in claim 20 wherein at least one of said water cooled components is a component operated at high voltages in excess of 12,000 volts.

22. A laser as in claim 21 wherein said high voltage is isolated from ground using an inductor through which cooling water flows.

23. A laser as in claim 1 wherein said pulse power system comprises a resonant charging system to charge a charging capacitor to a precisely controlled voltage.

24. A laser as in claim 23 wherein said resonance charging system comprises a De-Qing circuit.

25. A laser as in claim 23 wherein said resonance charging system comprises a bleed circuit.

26. A laser as in claim 23 wherein said resonant charging system comprises a De-Qing circuit and a bleed circuit.

27. A laser as in claim 1 wherein said pulse power system comprises a charging system comprised of at least three power supplies arranged in parallel.

28. A laser as in claim 1 wherein said fan comprises a shaft supported by ceramic bearings.