Vibrating gyroscope
First Claim
1. A vibrating gyroscope comprising:
- a vibrator including a plurality of piezoelectric members stacked and polarized in directions opposing each other and defining two mutually opposing main surfaces;
at least one drive electrode formed on one of the main surfaces of the vibrator to input a signal for exciting the vibrator;
at least two detection electrodes formed on one of the main surfaces of the vibrator to output a signal in accordance with vibration of the vibrator; and
at least one reference electrode formed on at least one of the main surfaces of the vibrator in a position opposing at least one of the at least one drive electrode and the detection electrodes.
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Abstract
A vibrating gyroscope includes a vibrator having a plurality of piezoelectric members stacked and polarized in directions opposing each other; at least one drive electrode formed on one of the mutually opposing main surfaces of the vibrator to input a signal for exciting the vibrator; at least two detection electrodes formed on one of the mutually opposing main surfaces of the vibrator to output a signal in accordance with vibration of the vibrator; and at least one reference electrode formed on one of the mutually opposing main surfaces of the vibrator to be connected to a reference potential. The reference electrode is formed in a position opposing the drive electrodes and the detection electrodes.
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Citations
8 Claims
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1. A vibrating gyroscope comprising:
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a vibrator including a plurality of piezoelectric members stacked and polarized in directions opposing each other and defining two mutually opposing main surfaces;
at least one drive electrode formed on one of the main surfaces of the vibrator to input a signal for exciting the vibrator;
at least two detection electrodes formed on one of the main surfaces of the vibrator to output a signal in accordance with vibration of the vibrator; and
at least one reference electrode formed on at least one of the main surfaces of the vibrator in a position opposing at least one of the at least one drive electrode and the detection electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification