Superconducting substrate structure and a method of producing such structure

• US 6,479,139 B1
• Filed: 11/22/2000
• Issued: 11/12/2002
• Est. Priority Date: 11/23/1999
• Status: Expired due to Fees

• Current Assignee: Telefonaktiebolaget LM Ericsson
• Original Assignee: Telefonaktiebolaget LM Ericsson
• Inventors: Wikborg, Erland, Ivanov, Zdravko, Claeson, Tord
• Primary Examiner(s): Dunn, Tom
• Assistant Examiner(s): DUNN, COLLEEN P
• Application Number:
  US09/718,668
• Time in Patent Office: 720 Days
• Field of Search: 428/216, 428/702, 428/701, 428/930, 505/234, 505/237, 505/239, 505/812, 505/329, 505/330, 505/434, 505/450, 505/500, 505/742
• US Class Current: 428/216
• CPC Class Codes: H10N 60/0576 characterised by the substrate
• CPC Class Codes: H10N 60/203 comprising high-Tc ceramic materials
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick

Abstract

A superconducting substrate structure with a high temperature superconducting (HTS) ground plane, for epitaxial growth of multilayers thereon is provided. The substrate structure includes a composite substrate structure with a first and a second substrate layer each covered by an HTS film, which HTS films are bonded together through annealing to form a buried superconducting layer wherein one of the substrate layers is polished to form a smooth insulating layer adjacent to an HTS layer. A method of producing a superconducting substrate structure is provided including the steps of arranging two substrate layers on which HTS films are provided such that the HTS films come in close contact to one another, applying a high pressure in an oxygen atmosphere and at an elevated temperature such that the HTS films are annealed and bonded together, and subsequently polishing one of the substrate layers to form a smooth insulator.

Claims

1. A superconducting (HTS) ground plane for epitaxial growth of multilayers thereon, wherein the substrate structure comprises a composite substrate structure having a first substrate layer and a second substrate layer, each substrate layer covered by a HTS film on at least one side, which HTS films are bonded together through annealing to form a buried superconducting layer, one of the substrate layers being polished to form a smooth insulating layer adjacent to an HTS layer.

2. The structure according to claim 1, wherein the first and second substrate layers respectively have a thickness of about 0.1-1 mm and in that the second substrate layer is polished to have a thickness of about 1-50 μ

m.

3. The structure according to claim 1, wherein the HTS films covering said first and second substrate layers are bonded together to form a HTS layer have a thickness of about 200 nm.

4. The structure according to claim 1, further comprising a large area substrate structure.

5. The structure according to claim 1, wherein a multilayer structure is epitaxially grown on top of the substrate layer forming a smooth insulator.

6. The structure according to claim 1, wherein HTS films are bonded to each other through annealing in oxygen under a high pressure and at a high temperature.

7. The structure according to claim 1, wherein the substrate layer forming a smooth insulator has a thickness of about 1-50 μ

m.

8. The structure according to claim 1, wherein the substrate layers comprise SrTiO₃ and in that the HTS films comprise YBCO.

9. A multilayer structure comprising a number of alternating high temperature superconducting (HTS) films and insulating layers epitaxially grown an a substrate structure comprising a superconducting ground plane, the substrate structure comprising a composite substrate structure having a first substrate layer and a second substrate layer, each substrate layer covered by a HTS film on at least one side thereof respectively, which HTS films are bonded together through annealing to form a buried HTS layer, the substrate layer on which the HTS films and insulating layers are grown being polished to form a smooth insulating layer.

10. The multilayer structure according to claim 9, wherein the second substrate layer has a thickness of about 0.1-1 mm and in that the HTS layer has a thickness of about 200 nm, whereas the polished first substrate layer is polished to have a thickness of about 1-50 μ

m.

11. The multilayer structure according to claim 9, wherein the HTS films are bonded to each other through annealing in oxygen under a high pressure and at a high temperature.

12. The multilayer structure according to claim 9, wherein the buried HTS layer comprises YBCO and in that the substrate layers comprise SrTiO₃.

13. The multilayer structure according to claim 9, wherein the multilayer structure is used for making superconducting microwave circuits by etching out the multilayer structure, the buried HTS film forming a ground plane.

14. A method of producing a substrate structure with a superconducting ground plane comprising the steps of:

providing a first and a second substrate layer;

covering each of said first and second substrate layers with a thin high temperature superconducting (HTS) film, respectively;

arranging of the substrate layers such that the thin HTS films are in close contact to one another;

bonding the HTS films together through annealing in oxygen at a high temperature and under a high pressure to form a buried HTS layer; and

polishing one of the substrate layers on a side opposite to the buried HTS layer to form a smooth insulator.

15. The method according to claim 14, wherein the substrate layers have a thickness of about 0.1-1 mm before polishing.

16. The method according to claim 14,wherein one of the substrate layers is polished to have a thickness of about 1-50 μ

m.

17. The method according to claim 14, wherein a temperature of about 800-1300°

C. is applied during the annealing step.

18. The method according to claim 14, further comprising the steps of epitaxially growing a multilayer structure comprising of HTS films and insulating layers in an alternating manner on the smooth insulator.

19. A method of producing a multilayer structure comprising high temperature superconducting (HTS) films and insulating films, comprising the steps of:

providing a first and a second substrate layer;

covering each of said first and second substrate layers with a thin HTS film respectively;

arranging the substrate layers such that the thin HTS films are in close contact to one another,

bonding the HTS films together through annealing in oxygen at a high temperature and under a high pressure to form a buried HTS layer;

polishing one of the substrate layers on a side opposite to the buried HTS layer to form a smooth insulator; and

epitaxially and alternatingly growing HTS films and insulating layers on the smooth insulator.