Method of low-selective etching of dissimilar materials having interfaces at non-perpendicular angles to the etch propagation direction

• US 6,479,394 B1
• Filed: 05/03/2000
• Issued: 11/12/2002
• Est. Priority Date: 05/03/2000
• Status: Expired due to Term

• Current Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Original Assignee: Maxim Integrated Products, Inc. (Analog Devices, Inc.)
• Inventors: Kalnitsky, Alexander, Choutov, Dmitri A., Stutzin, Geoffrey C.
• Primary Examiner(s): GOUDREAU, GEORGE A
• Application Number:
  US09/564,327
• Time in Patent Office: 923 Days
• Field of Search: 438/697, 438/700, 438/714, 438/719, 438/720, 438/724
• US Class Current: 438/714
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/31111 by chemical means
• CPC Class Codes: H01L 21/32137 of silicon-containing layers

Abstract

A method of etching dissimilar materials having interfaces at non-perpendicular angles to the direction of the etch propagation that results in a low selectivity etch in order to achieve an improved planarized etched surface. The method includes the step of subjecting the dissimilar materials to a process gas mixture that includes a first gas that dominates the etching of a first material and a second gas that dominates the etching of a second material. The flow rates for the first and second materials are selected, along with other parameters of the plasma etch apparatus, to substantially equalize the etching rates for the two materials. This method is particularly useful to achieve a low-selective etching of materials having interfaces that are at a non-perpendicular angle with respect to the etch propagation.

Claims

1. In a plasma etching apparatus, a method of etching first and second materials having interfaces at non-perpendicular angles to the direction of an etch propagation, comprising:

subjecting said first and second materials to a plasma gas mixture comprising a first gas which dominates an etching of said first material, a second gas which dominates an etching of said second material, and a third gas which reduces the etching rate of said first material, wherein said plasma gas mixture etches said first and second materials at substantially the same rate.

2. The method of claim 1, wherein said interfaces are substantially parallel to the direction of said etch propagation.

3. The method of claim 1, wherein said first material comprises a mono- or poly-crystalline silicon and said first gas comprises hydrogen bromide.

4. The method of claim 1, wherein said first material comprises a mono- or poly-crystalline silicon and said first gas comprises chlorine.

5. The method of claim 1, wherein said first material comprises a mono- or poly-crystalline silicon and said third gas comprises tri-fluoro methane.

6. The method of claim 1, wherein said first material comprises a mono- or poly-crystalline silicon and said third gas comprises di-fluoro methane.

7. The method of claim 1, wherein said second material comprises an oxide or a nitride and said second gas comprises CF₄.

8. The method of claim 1, wherein said second material comprises an oxide or and a nitride a fourth gas comprises oxygen (O₂).

9. The method of claim 1, further including selecting secondary parameters of said plasma etching apparatus so that said first and second materials are etched at substantially the same rate.

10. The method of claim 1, wherein said first material comprises a mono- or poly-crystalline silicon, said first gas comprises hydrogen bromide or chlorine, and said third gas comprises tri-fluoro methane or di-fluoro methane;

wherein said second material comprises an oxide or a nitride, said second gas comprises CF₄, and a fourth gas comprises oxygen to reduce an etching rate of said oxide or nitride materials; and

further including selecting secondary parameters of said plasma etching apparatus so that said first and second materials are etched at substantially the same rate.

11. In a plasma etching apparatus, a method of etching first and second materials having interfaces at non-perpendicular angles to the direction of an etch propagation, comprising:

subjecting said first and second materials to a plasma gas mixture comprising a first gas which dominates an etching of said first material, and a second gas which dominates an etching of said second material, wherein said plasma gas mixture etches said first and second materials at substantially the same rate, wherein said first material comprises a mono- or poly-crystalline silicon and said first gas comprises chlorine (CL₂).

12. In a plasma etching apparatus, a method of etching first and second materials having interfaces at non-perpendicular angles to the direction of an etch propagation, comprising:

subjecting said first and second materials to a plasma gas mixture comprising a first gas which dominates an etching of said first material, and a second gas which dominates an etching of said second material, wherein said plasma gas mixture etches said first and second materials at substantially the same rate, wherein said first material comprises a mono- or poly-crystalline silicon and said third gas comprises di-fluoro methane (CH₂F₂).

13. In a plasma etching apparatus, a method of etching first and second materials having interfaces at non-perpendicular angles to the direction of an etch propagation, comprising:

subjecting said first and second materials to a plasma gas mixture comprising a first gas which dominates an etching of said first material, and a second gas which dominates an etching of said second material, wherein said plasma gas mixture etches said first and second materials at substantially the same rate, wherein said second material comprises an oxide or a nitride and said second gas comprises CF₄.

14. In a plasma etching apparatus, a method of etching first and second materials having interfaces at non-perpendicular angles to the direction of an etch propagation, comprising:

subjecting said first and second materials to a plasma gas mixture comprising a first gas which dominates an etching of said first material, and a second gas which dominates an etching of said second material, wherein said plasma gas mixture etches said first and second materials at substantially the same rate, wherein said first material comprises mono- or poly-crystalline silicon and said first gas comprises hydrogen bromide (HBr) or chlorine (CL2);

wherein said second material comprises an oxide or a nitride and said second gas comprises CF₄, and further including selecting secondary parameters of said plasma etching apparatus so that said first and second materials are etched at substantially the same rate.