Near-field optical probe

• US 6,479,816 B1
• Filed: 10/26/1999
• Issued: 11/12/2002
• Est. Priority Date: 10/27/1998
• Status: Expired due to Term

• Current Assignee: Seiko Instruments Incorporated (Seiko Group)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Oumi, Mamabu, Kasama, Nobuyuki, Kato, Kenji, Niwa, Takashi, Chiba, Norio, Mitsuoka, Yasuyuki
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Fernandez, Kalimah
• Application Number:
  US09/426,532
• Time in Patent Office: 1,113 Days
• Field of Search: 250/216, 250/227.11, 250/306, 250/307, 250/201.3, 250/311, 250/310
• US Class Current: 850/30
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G21K 1/06 using diffraction, refraction or reflection, e.g. monochromators G21K1/10, G21K7/00 take precedence
• CPC Class Codes: Y10S 977/862 Near-field probe

Abstract

A near-field optical probe with a resolving power exceeding a diffraction limit of light is provided utilizing near-near-field light. A near-field optical probe is formed by a core and a shading film. The core has a tip surface spotted with inwardly depressed points with respect to the surface. This provides within the tip surface a light intensity distribution in a distributed form instead of a conventional rectangle function. Its Fourier expansion is increased in short-wavelength lattice constant component. Utilizing this component, a near-field optical probe is realized having a resolving power exceeding a diffraction limit of light.

Claims

1. A near-field optical probe comprising:

a supporting member;

a microscopic aperture formed at a tip of the supporting member for generating near-near-field light or scattering and detecting near-near-field light to interact with an object; and

a fine structure having features smaller than a diameter of the microscopic aperture formed in or nearby a surface of the microscopic aperture.

2. A near-field optical probe according to claim 1;

wherein the fine structure comprises an optical characteristic distribution on or nearby the microscopic aperture surface.

3. A near-field optical probe according to claim 2;

wherein the optical characteristic distribution is due to surface roughening in or nearby the microscopic aperture surface.

4. A near-field optical probe according to claim 2;

wherein the optical characteristic distribution comprises a distribution of a material in or nearby the microscopic aperture surface.

5. A near-field optical probe according to any one of claims 1 to 4;

wherein the microscopic aperture comprises one side of a cone-shaped hole formed through a planar substrate.

6. A near-field optical probe according to any one of claims 1 to 4;

wherein the supporting member having the tip formed with the microscopic aperture is a sharpened optical waveguide.

7. A near-field optical probe according to any one of claims 1 to 4;

wherein the supporting member having the tip formed with the microscopic aperture is a cantilever having a sharpened protrusion.

8. A near-field optical probe according to claim 1;

wherein the supporting member comprises an optical fiber having a sharpened tip terminating in the microscopic aperture, the optical fiber being coated with a light-shielding film except for the microscopic aperture.

9. A near-field optical probe according to claim 8;

wherein the sharpened tip is formed by heating the optical fiber, extending the optical fiber and cutting the optical fiber.

10. A near-field optical probe according to claim 1;

wherein the fine structure comprises depressions formed in the microscopic aperture surface.

11. A near-field optical probe according to claim 10;

wherein the depressions comprise etched depressions.

12. A near-field optical probe according to claim 10;

wherein the depressions comprise ion-milled depressions.

13. A near-field optical probe according to claim 12;

wherein the ion-milled depressions are milled in a vacuum using argon ions at an acceleration of about 4.0 kV at about 1 mA.

14. A near-field optical probe according to claim 1;

wherein the fine structure is formed along an edge of the microscopic aperture.

15. A near-field optical probe according to claim 1;

wherein the fine structure comprises plural recesses having a diameter of several nanometers formed in the microscopic aperture.

16. A near-field optical probe according to claim 1;

wherein the support member has an optical waveguide formed therein.

17. An optical probe comprising:

an optical waveguide having a sharpened tip;

an aperture portion for passing light therethrough formed at an end of the tip; and

a surface pattern formed in a surface of the aperture portion for disrupting light.

18. An optical probe according to claim 17;

wherein the optical waveguide comprises an optical fiber having a sharpened tip terminating in the aperture portion and being coated with a light-shielding film except at the aperture portion.

19. An optical probe according to claim 18;

wherein the sharpened tip is formed by heating the optical fiber, extending the optical fiber and cutting the optical fiber.

20. An optical probe according to claim 17;

wherein the surface pattern comprises depressions formed in the surface of the aperture portion.

21. An optical probe according to claim 20;

wherein the depressions comprise etched depressions.

22. An optical probe according to claim 20;

wherein the depressions comprise ion-milled depressions.

23. An optical probe-according to claim 22;

wherein the ion-milled depressions are formed in a vacuum using argon ions at an acceleration of about 4.0 kV and at about 1 mA.

24. An optical probe according to claim 17;

wherein the surface pattern is formed along an edge of the aperture.

25. An optical probe according to claim 17;

wherein the surface pattern comprises plural recesses having a diameter of several nanometers formed in the aperture.

26. An optical probe according to claim 17;

wherein the optical waveguide comprises a support member in which the optical waveguide is formed.

27. A probe microscope for observing a sample, comprising:

an optical waveguide probe having a sharpened end provided with an aperture portion for passing light, a surface of the aperture portion having formed thereon a surface pattern for disrupting light passing therethrough;

a light source and optics for irradiating the sample with light;

a photoelectric converter and optics for receiving at least one of a light transmitted through the sample and the waveguide probe;

a laser source for producing laser light used for detecting deflections of the probe during scanning movement of the probe across a surface of the sample;

a lens for directing the laser light to a reflective surface of the probe;

detecting means for detecting light reflected from the reflective surface;

moving means for causing relative movement between the sample and the probe; and

control means for controlling a distance between the surface of the sample and a front end of the probe.

28. A probe microscope according to claim 27;

wherein the surface pattern has features smaller than a diameter of the aperture portion.

29. A head mechanism for a data storage device, comprising:

a support member for undergoing controlled movement with respect to a data storage medium and being connectable to a mechanism for swinging the support member about a swing axis; and

an optical waveguide supported by the support member and having an aperture portion formed therein for passing light, a surface of the aperture portion having formed thereon a surface pattern for disrupting light passed therethrough.

30. A head mechanism for a data storage device according to claim 29;

wherein the surface pattern has features smaller than a diameter of the aperture portion.

31. A head mechanism for a data storage device according to claim 29;

wherein the optical waveguide is formed in the support member.

32. A head mechanism for a data storage device according to claim 31;

wherein a portion of the support member in the shape of an inverted cone is removed from the support member and the optical waveguide is formed in the shape of an inverted cone in the removed portion of the support member so that the aperture portion comprises a tip of the inverted cone.

33. A head mechanism for a data storage device according to claim 31;

wherein the support member is formed of a semiconductor material.