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Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage

  • US 6,479,991 B1
  • Filed: 04/01/1999
  • Issued: 11/12/2002
  • Est. Priority Date: 04/01/1998
  • Status: Expired due to Fees
First Claim
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1. A stage system, comprising:

  • a movable stage;

    a first driving mechanism, having a magnet and a coil unit, for moving said stage along a predetermined direction, said coil unit including a coil and a yoke, wherein said magnet is connected to the stage side; and

    a second driving mechanism for moving said coil unit along the predetermined direction, wherein, while a position or a speed of said stage is controlled as said stage is driven through said first driving mechanism, said coil unit is moved substantially in synchronism with said stage.

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