Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage
First Claim
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1. A stage system, comprising:
- a movable stage;
a first driving mechanism, having a magnet and a coil unit, for moving said stage along a predetermined direction, said coil unit including a coil and a yoke, wherein said magnet is connected to the stage side; and
a second driving mechanism for moving said coil unit along the predetermined direction, wherein, while a position or a speed of said stage is controlled as said stage is driven through said first driving mechanism, said coil unit is moved substantially in synchronism with said stage.
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Abstract
A stage system includes a movable stage, a first driving mechanism, having magnet and a coil unit, for moving the stage along a predetermined direction, the coil unit including a coil and a yoke, wherein the magnet is connected to the stage side, and a second driving mechanism for moving the coil unit along the predetermined direction. While a position or a speed of the stage is controlled as the stage is driven through the first driving mechanism, the coil unit is moved substantially in synchronism with the stage.
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Citations
26 Claims
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1. A stage system, comprising:
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a movable stage;
a first driving mechanism, having a magnet and a coil unit, for moving said stage along a predetermined direction, said coil unit including a coil and a yoke, wherein said magnet is connected to the stage side; and
a second driving mechanism for moving said coil unit along the predetermined direction, wherein, while a position or a speed of said stage is controlled as said stage is driven through said first driving mechanism, said coil unit is moved substantially in synchronism with said stage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 17)
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13. An exposure apparatus, comprising:
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a stage being movable while holding one of a wafer and a reticle thereon;
a first driving mechanism, having a magnet and a coil unit, for moving said stage along a predetermined direction, said coil unit including a coil and a yoke, wherein said magnet is connected to the stage side; and
a second driving mechanism for moving said coil unit along the predetermined direction, wherein, while a position or a speed of said stage is controlled as said stage is driven through said first driving mechanism, said coil unit is moved substantially in synchronism with said stage. - View Dependent Claims (14, 15, 18, 19, 20, 21, 22, 23, 24, 25, 26)
providing an exposure apparatus as recited in claim 13; and
transferring a pattern of a reticle into a wafer.
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15. A method according to claim 14 further comprising:
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applying a photosensitive material to the wafer before exposure; and
developing the wafer after the exposure.
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18. An exposure apparatus according to claim 13, wherein said magnet and said coil have substantially the same size with respect to the movement direction.
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19. An exposure apparatus according to claim 13, wherein said yoke comprises a ferromagnetic material of a flat plate shape.
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20. An exposure apparatus according to claim 13, wherein said coil is wound around said yoke.
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21. An exposure apparatus according to claim 13, wherein said coil comprises a flat coil.
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22. An exposure apparatus according to claim 13, wherein said first driving mechanism includes a plurality of coils.
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23. An exposure apparatus according to claim 13, wherein said first driving mechanism moves said stage two-dimensionally.
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24. An exposure apparatus according to claim 13, wherein said coil comprises a first coil for producing a driving force in a first direction with respect to said magnet, and a second coil for producing a driving force in a second direction with respect to said magnet.
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25. An exposure apparatus according to claim 13, wherein said second driving mechanism is operable to move, two-dimensionally, one of said magnet and said coil of said first driving mechanism as connected to said second driving mechanism.
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26. An exposure apparatus according to claim 13, wherein said yoke has a recess formed in a peripheral portion thereof.
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16. An exposure apparatus according to clams 13, wherein said second driving mechanism includes a feed screw.
Specification