Wavefront sensor, and lens meter and active optical reflecting telescope using the same

• US 6,480,267 B2
• Filed: 12/26/2000
• Issued: 11/12/2002
• Est. Priority Date: 12/28/1999
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Topcon
• Original Assignee: Kabushiki Kaisha Topcon
• Inventors: Fujino, Makoto, Yanagi, Eiichi
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): Nguyen, Sang H.
• Application Number:
  US09/748,894
• Publication Number:
  US 20010006210A1
• Time in Patent Office: 686 Days
• Field of Search: 356/121, 356/122, 356/123, 356/124, 356/125, 250/201.9, 359/849, 359/838, 359/846, 351/221
• US Class Current: 356/121
• CPC Class Codes: G01J 9/00 Measuring optical phase difference devices or arrangements for controlling the phase of light beams G02F1/01; Determining degree of coherence; Measuring optical wavelength spectrometry G01J3/00

Abstract

A wavefront sensor includes a plurality of lenses disposed in the same plane, and an area sensor that receives a bundle of rays of light collected through each of the lenses as a luminous point. Each of the lenses comprises a plurality of concentric areas with different focal lengths, and the area sensor is located substantially halfway between a first position in which a plane wave forms an image after passing through one of the concentric areas with a minimum focal length, and a second position in which the plane wave fronts an image after passing through another area with a medium focal length. With the wavefront sensor thus arranged, the measurement can be always achieved with high accuracy without involving noticeable blurring of luminous points on the area sensor regardless of the wavefront shape of a light beam indent to the lenses.

Claims

1. A wavefront sensor comprising:

a plurality of lenses disposed in the same plane; and

an area sensor which receives a bundle of rays of light collected through each of said lenses as a luminous point, wherein the wavefront sensor measures wavefront shape of a light beam incident to said lenses based on the position of the luminous points on said area sensor, characterized by each of said lenses;

comprises a plurality of concentric areas with different focal length and said area sensor is located substantially halfway between a first position in which a plane wave forms an image after passing through one of said concentric areas with a minimum focal length, and a second position in which the plane wave forms an image after passing through another area with a maximum focal length.

2. The wavefront sensor according to claim 1, wherein the respective focal lengths of said plurality of concentric areas change stepwife from a central portion toward a peripheral portion of each of said lenses.

3. The wavefront sensor according to claim 2, wherein the central portion of each of said lenses has the maximum focal length, and the peripheral portion of each of said lenses has the minimum focal length.

4. The wavefront sensor according to claim 3, wherein said lenses each comprise a diffraction optical element.

5. A lens meter using the wavefront sensor according to claim 4.

6. An active optical reflection telescope using the wavefront sensor according to claim 4.

7. A lens meter using the wavefront sensor according to claim 3.

8. An active optical reflection telescope using the wavefront sensor according to claim 3.

9. The wavefront sensor according to claim 2, wherein said lenses each comprise a diffraction optical element.

10. A lens meter using the wavefront sensor according to claim 9.

11. An active optical reflection telescope using the wavefront sensor according to claim 9.

12. A lens meter using the wavefront sensor according to claim 2.

13. An active optical reflection telescope using the wavefront sensor according to claim 2.

14. The wavefront sensor according to claim 1, wherein the respective focal lengths of said concentric areas change continuously from a central portion toward a peripheral portion of each of said lenses.

15. The wavefront sensor awarding to claim 3, wherein the central portion of each of said lenses has the maximum focal length, and the peripheral portion of each of said lenses has the minimum focal length.

16. The wavefront sensor according to claim 15, wherein said lenses each comprise a diffraction optical element.

17. A lens meter using the wavefront sensor according to claim 16.

18. An active optical reflection telescope using the wavefront sensor according to claim 16.

19. A lens meter using the wavefront sensor according to claim 15.

20. An active optical reflection telescope using the wavefront sensor according to claim 15.

21. The wavefront sensor according to claim 14, wherein said lenses each comprise a diffraction optical element.

22. A lens meter using the wavefront sensor according to claim 21.

23. An active optical reflection telescope using the wavefront sensor according to claim 21.

24. A lens meter using the wavefront sensor according to claim 14.

25. An active optical reflection telescope using the wavefront sensor according to claim 14.

26. The wavefront sensor according to claim 1, wherein said lenses each comprise a diffraction optical element.

27. A lens meter using the wavefront sensor according to claim 26.

28. A active optical reflection telescope using the wavefront sensor according to claim 26.

29. A lens meter using the wavefront sensor according to claim 1.

30. An active optical reflection telescope using the wavefront sensor according to claim 1.