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Multiple layer confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation

  • US 6,480,285 B1
  • Filed: 03/16/2000
  • Issued: 11/12/2002
  • Est. Priority Date: 01/28/1997
  • Status: Expired due to Fees
First Claim
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1. A method for discriminating an in-focus image from an out-of-focus image so as to reduce errors in information representing the in-focus image, comprising the steps of:

  • (a) producing a probe beam and a reference beam from an array of monochromatic point radiation sources;

    (b) producing an in-focus return probe beam by directing the probe beam to an array of in-focus image points;

    (c) producing antisymmetric spatial properties in the in-focus return probe beam;

    (d) producing an in-focus reference beam;

    (e) producing antisymmetric spatial properties in the in-focus reference beam;

    (f) interfering the in-focus reference beam with a beam from a plurality of out-of-focus image points;

    (g) interfering the in-focus reference beam with the in-focus return probe beam;

    (h) reducing systematic and statistical errors in data produced by a detector to represent the information being determined by detecting the complex amplitude of the in-focus return probe beam as interference data by means of detector elements of the detector wherein the interference data comprises an interference term between the in-focus reference beam and the in-focus return probe beam and another interference term of substantially reduced amplitude between the out-of-focus image beams associated with out-of-focus image points and corresponding portions of the in-focus reference beam.

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