Thin film forming method and apparatus

• US 6,481,369 B1
• Filed: 10/12/2000
• Issued: 11/19/2002
• Est. Priority Date: 10/14/1999
• Status: Expired due to Term

• Current Assignee: Hoya Corporation
• Original Assignee: Hoya Corporation
• Inventors: Takahashi, Yukihiro, Shinde, Kenichi
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): HASSANZADEH, PARVIZ
• Application Number:
  US09/686,763
• Time in Patent Office: 768 Days
• Field of Search: 118/723.EB, 118/223.VE, 118/423.CB, 118/723.FE, 118/723.FF, 118/726, 118/712, 118/708, 118/665, 118/695, 118/696, 118/697, 156/626.1, 427/10, 427/566, 427/8, 427/9, 756/448, 756/230, 756/229
• US Class Current: 118/723.0EB
• CPC Class Codes: C23C 14/547 using optical methods

Abstract

To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility. Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3. The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing device.

Claims

1. An apparatus for forming thin film on an object, comprising:

an optical film thickness meter that measures a thickness of a thin film by measuring a light quantity of transmission or reflection obtained when a prescribed light is applied to an object on which the thin film is formed, wherein the light quantity depends on the thickness of the thin film;

a means for storing standard light quantity values for transmission or reflection versus time as measured by the optical film thickness meter when the prescribed light is applied to the object when the object is a standard object, wherein the means for storing standard light quantity values also stores standard light quantity value variations for transmission or reflection versus time determined from the standard light quantity values;

a means for vaporizing a thin film forming substance and thereby depositing a thin film on the object; and

a means for controlling an amount of the film forming substance vaporized by the means for vaporizing, wherein actual light quantity values of transmission or reflection are measured versus time by the optical film thickness meter when the prescribed light is applied to the object, or actual light quantity value variations of transmission or reflection versus time are determined from the actual light quantity values, and wherein the actual light quantity value measured at a given point in time by the optical film thickness meter becomes equal to or approximately equal to the respective standard light quantity value stored in the means for storing.

2. The thin film forming apparatus of claim 1, wherein said means for vaporizing a thin film forming substance comprises an electron gun for vaporizing the film forming substance.

3. The thin film forming apparatus of claim 2, wherein said storing means stores standard reflection light quantity value data (ls₁, ls₂, ls₃, . . . , ls_m) at respective time points (ts₁, ts₂, ts₃, . . . , ts_m) for a standard thin film;

wherein said optical film thickness meter measures actual reflection light quantity values (l₁, l₂, l₃, . . . , l_n) of a thin film at respective time points as a next film is formed at respective unit times (t₁, t₂, t₃, . . . , t_n); and

wherein said control means comprises;

a means for calculating a light quantity variation (Δ

l=l_i−

l<sub>i−

1</sub>), after a lapse of an arbitrary time (Δ

t=t_i−

t<sub>i−

1</sub>) determined by said control means;

a means for searching the standard light quantity value data storing means for a light quantity value (ls) that is the equal or close to a light quantity value (l<sub>i−

1</sub>) measured by the optical film thickness meter at an arbitrary time point (t<sub>i−

1</sub>) and a corresponding time point (ts), wherein when there is no light quantity value (ls) that is equal to or close to the light quantity value (l<sub>i−

1</sub>) an approximate value for the light quantity value (ls) is calculated;

a means for determining a standard light quantity value (ls′

) after a lapse of the arbitrary time (Δ

t=t_i−

t<sub>i−

1</sub>), and for determining a standard light quantity variation (Δ

ls_i=ls′

−

ls) between the standard light quantity value (ls) and the standard light quantity value (ls′

); and

a means for controlling power to be applied to the electron gun by using the measurement light quantity variation (Δ

l=l_i−

l<sub>i−

1</sub>) determined by the measurement light quantity variation calculating means and the standard light quantity variation (Δ

ls_i=ls′

−

ls) determined by the standard light quantity variation calculating means.

4. A thin film forming apparatus of claim 3, wherein said electron gun power controlling means performs conversion operations of Ri≡

1−

(Δ

l_i/Δ

ls_i) and Qi≡

kRi|Ri|(k;

arbitrary constant), and controls power supplied to the electron gun by PID (proportion, integration, and differentiation) control so as to minimize |Qi|;

wherein Δ

li≡

li−

l<sub>i−

1</sub>;

wherein Δ

ls_i≡

ls′

−

ls;

wherein li is an actual light quantity at a time point of ti;

wherein l<sub>i−

1</sub> is an actual light quantity at a time point of t<sub>i−

1</sub>;

wherein ls is a standard light quantity at a time point of ts;

wherein ls′

is a standard light quantity at a time point ts′

;

wherein ts′

is defined as;

ts′

=ts+Δ

t, wherein Δ

t=t_i−

t<sub>i−

1</sub>.

5. The thin film forming apparatus of claim 1, wherein said storing means stores standard reflection light quantity value data (ls₁, ls₂, ls₃, . . . , ls_m) at respective time points (ts₁, ts₂, ts₃, . . . , ts_m) for a standard thin film;

wherein said optical film thickness meter measures actual reflection light quantity values (l₁, l₂, l₃, . . . , l_n) of a thin film at respective time points as a next film is formed at respective unit times (t₁, t₂, t₃, . . . , t_n); and

wherein said control means comprises;

a means for calculating a light quantity variation (Δ

l=l_i−

l<sub>i−

1</sub>), after a lapse of an arbitrary time (Δ

t=t_i−

t<sub>i−

1</sub>) determined by said control means;

a means for searching the standard light quantity value data storing means for a light quantity value (ls) that is the equal or close to a light quantity value (l<sub>i−

1</sub>) measured by the optical film thickness meter at an arbitrary time point (t<sub>i−

1</sub>) and a corresponding time point (ts), wherein when there is no light quantity value (ls) that is equal to or close to the light quantity value (l<sub>i−

1</sub>) an approximate value for the light quantity value (ls) is calculated;

a means for determining a standard light quantity value (ls′

) after a lapse of the arbitrary time (Δ

t=t_i−

t<sub>i−

1</sub>), and for determining a standard light quantity variation (Δ

ls_i=ls′

−

ls) between the standard light quantity value (ls) and the standard light quantity value (ls′

); and

a means for controlling power to be applied to an electron gun by using the measurement light quantity variation (Δ

l=l_i−

l<sub>−

1</sub>) determined by the measurement light quantity variation calculating means and the standard light quantity variation (Δ

ls_i=ls′

−

ls) determined by the standard light quantity variation calculating means.

6. A thin film forming apparatus of claim 5, wherein said electron gun power controlling means performs conversion operations of Ri≡

1−

(Δ

l_i/Δ

ls_i) and Qi≡

kRi|Ri|(k;

arbitrary constant), and controls power supplied to the electron gun by PID (proportion, integration, and differentiation) control so as to minimize |Qi|;

wherein Δ

li≡

li−

l<sub>i−

1</sub>;

wherein Δ

ls_i≡

ls′

−

ls;

wherein li is an actual light quantity at a time point of ti;

wherein l<sub>i−

1</sub> is an actual light quantity at a time point of t<sub>i−

1</sub>;

wherein ls is a standard light quantity at a time point of ts;

wherein ls′

is a standard light quantity at a time point ts′

;

wherein ts′

is defined as;

ts′

=ts+Δ

t, wherein Δ

t=t_i−

t<sub>i−

1</sub>.

7. A thin film forming apparatus, comprising:

a vacuum chamber;

a coating dome disposed at a top position inside of said vacuum chamber for holding objects on which a film is to be formed;

an electron gun, having a power supply, and being disposed at a bottom of said vacuum chamber and arranged to vaporize a film forming material;

a control means disposed outside of said vacuum chamber for receiving data signals and electrically connected to said electron gun to send output control signals to control the power supply of the electron gun;

a crucible disposed adjacent to said electron gun for holding the film forming material;

a shutter disposed above said crucible for controlling the deposition of vaporized film forming material going from the bottom to the top of said vacuum chamber, and connected electrically to said control means for receiving opening/closing instruction signals from the control means;

a substrate thermometer disposed in the vicinity of said coating dome for measuring the temperature of the objects held by said coating dome, and connected electrically to said control means for sending data to said control means;

a vacuum gauge disposed inside of said vacuum chamber for measuring the degree of vacuum inside of said vacuum chamber, and connected electrically to said control means for sending data to said control means;

an evacuation unit disposed outside of said vacuum chamber for evacuating said vacuum chamber, and connected electrically to said control means to receive operating signals;

a halogen heater disposed inside of said vacuum chamber for heating the objects of film formation held by said coating dome, and connected electrically to said control means to receive on/off signals;

an optical film thickness meter disposed on the top of said vacuum chamber for measuring the thickness of a thin film deposited on the objects held by said coating dome, wherein the film thickness meter measures the thickness of the thin film by measuring a light quantity of transmission or reflection obtained when a prescribed light is applied to the objects on which the thin film is formed, wherein the light quantity depends on the thickness of the thin film;

a film thickness monitor connected to said optical film thickness meter for receiving signals from said optical film thickness meter, and connected electrically to said control means for outputting signals to said control means;

a standard light quantity value data storing means connected to said control means for storing standard light quantity value data and forwarding said standard light quantity value data to said control means; and

an input means connected to said control means for outputting preset values to said control means.

8. The thin film forming apparatus of claim 7, wherein said coating dome has a circular shape so that evaporation can be performed on a plurality of subjects at the same time.

9. The thin film forming apparatus of claim 7, wherein said thin film forming apparatus has a monitoring glass plate located at the center of said coating dome.

10. The thin film forming apparatus of claim 7, wherein said crucible is cooled.

11. The thin film forming apparatus of claim 7, wherein the crucible is made of a substance having high thermal conductivity.

12. A thin film forming apparatus of claim 7, wherein said controller performs conversion operations of Ri≡

1−

(Δ

l_i/Δ

ls_i) and Qi≡

kRi|Ri|, wherein k is an arbitrary constant, and controls power supplied to the electron gun by PID (proportion, integration, and differentiation) control so as to minimize |Qi|;

wherein Δ

li≡

li−

l<sub>i−

1</sub>;

wherein Δ

ls_i≡

ls′

−

ls;

wherein li is an actual light quantity at a time point of ti;

wherein l<sub>i−

1</sub> is an actual light quantity at a time point of t<sub>i−

1</sub>;

wherein ls is a standard light quantity at a time point of ts;

wherein ls′

is a standard light quantity at a time point ts′

;

wherein ts′

is defined as;

ts′

=ts+Δ

t, wherein Δ

t=t_i−

t<sub>i−

1</sub>.