Laser spectroscopy system

• US 6,483,589 B1
• Filed: 07/06/2000
• Issued: 11/19/2002
• Est. Priority Date: 07/12/1999
• Status: Expired due to Fees

• Current Assignee: Nippon Sanso Corporation (Mitsubishi Chemical Group Corp.)
• Original Assignee: Nippon Sanso Corporation (Mitsubishi Chemical Group Corp.)
• Inventors: Satoh, Takayuki, Suzuki, Katsumasa, Masusaki, Hiroshi
• Primary Examiner(s): Dang, Hung Xuan
• Application Number:
  US09/611,260
• Time in Patent Office: 866 Days
• Field of Search: 356/437, 356/436, 356/435, 356/434, 356/433, 356/432
• US Class Current: 356/437
• CPC Class Codes: G01N 2021/399 Diode laser
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 21/39 using tunable lasers

Abstract

In order to provide a laser spectroscopy system of simple construction and free of the effect of the fringe noise and to provide a laser spectroscopy system in which a reference cell is efficiently installed with minimum cost and space, there is disclosed a laser spectroscopy system comprising: a tunable laser diode source for generating a laser beam used for spectroscopic analysis; a sample cell where a sample gas is introduced; a first photo detector for measuring an intensity of a laser beam transmitted through the sample cell and having a beam receiving face; a beam splitter for splitting a portion of the laser beam from the laser source; and a second photo detector for measuring an intensity of a splitted laser beam from the beam splitter and having a beam receiving face, wherein the at least one of beam receiving faces is tilted to be at a predetermined angle from an axis of laser beam.

Claims

1. A laser spectroscopy system comprising:

a tunable laser diode source for generating a laser beam used for spectroscopic analysis;

a sample cell where a sample gas is introduced;

a first photo detector for measuring an intensity of a laser beam transmitted through said sample cell and having a beam receiving face;

a beam splitter for splitting a portion of said laser beam from said laser source; and

a second photo detector for measuring an intensity of a splitted laser beam from said beam splitter and having a beam receiving face,

wherein said at least one of beam receiving faces is tilted to be at a predetermined angle from an axis of laser beam.

2. A laser spectroscopy system as claimed in claim 1 further comprising:

a reference cell, where an object to be measured is introduced, being positioned on a beam path of a laser beam reflected from said beam receiving face of said at least one of said photo detector of which said beam receiving face is tilted; and

a third photo detector for measuring an intensity of a laser beam transmitted through said reference cell.