System and method for classifying an anomaly
First Claim
Patent Images
1. A method for classifying an anomaly of an object, the method comprising:
- preparing a primitive-based representation of an object having an anomaly;
comparing the primitive-based representation of the object to a primitive-based reference image to detect and locate the anomaly;
selecting a descriptor for the anomaly, the descriptor associated with a plurality of descriptor values;
determining a first descriptor value of the anomaly using the primitive-based representation;
comparing the first descriptor value with a second descriptor value associated with a defect class;
determining a match between the first descriptor value and the second descriptor value; and
classifying the anomaly as a defect according to the defect class.
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Abstract
A method and system for generating and managing a knowledgebase for use in identifying anomalies on a manufactured object, such as a semiconductor wafer, includes measures for adding, deleting, and organizing data from the knowledgebase.
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Citations
9 Claims
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1. A method for classifying an anomaly of an object, the method comprising:
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preparing a primitive-based representation of an object having an anomaly;
comparing the primitive-based representation of the object to a primitive-based reference image to detect and locate the anomaly;
selecting a descriptor for the anomaly, the descriptor associated with a plurality of descriptor values;
determining a first descriptor value of the anomaly using the primitive-based representation;
comparing the first descriptor value with a second descriptor value associated with a defect class;
determining a match between the first descriptor value and the second descriptor value; and
classifying the anomaly as a defect according to the defect class. - View Dependent Claims (2, 3, 4, 5, 6)
associating a confidence level with the defect class; and
determining the match of the first descriptor value with the second descriptor value using the confidence level.
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4. The method of claim 1, further comprising:
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associating a weight with the second descriptor value, the weight indicating a significance of the second descriptor value; and
determining the match of the first descriptor value with the second descriptor value using the weight.
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5. The method of claim 1, wherein the defect class is a first defect class, and further comprising:
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associating a secondary validation table with the first defect class, the secondary validation table operable to indicate an attribute of the first defect class operable to distinguish the first defect class from a second defect class; and
determining the match of the first descriptor value with the second descriptor value using the secondary validation table.
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6. The method of claim 1, further comprising:
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determining whether the defect class is correct for the anomaly; and
if the defect class is not correct;
determining that the anomaly is associated with a new defect class;
creating a new rule for the new defect class; and
storing the new rule in a knowledgebase.
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7. A method of indexing an anomaly, the method comprising:
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preparing a primitive-based representation of an object having an anomaly;
comparing the primitive-based representation of the object to a primitive-based reference image to detect and locate the anomaly;
creating a file for the anomaly;
selecting a descriptor having a descriptor value associated with the anomaly;
creating a subdirectory for the file, the subdirectory associated with the descriptor; and
using the descriptor value to name the subdirectory to produce a file name for the file of the anomaly. - View Dependent Claims (8, 9)
creating a second subdirectory for the file, the second subdirectory associated with a second defect descriptor; and
using a second descriptor value to name the second subdirectory to produce a second file name for the file of the anomaly.
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Specification